Evaluation and selection of EUVL-grade TiO2-SiO2 ultra-low-expansion glasses using the line-focus-beam ultrasonic material characterization system

Author(s):  
Mototaka Arakawa ◽  
Yuji Ohashi ◽  
Jun-ichi Kushibiki
2019 ◽  
Vol 58 (SG) ◽  
pp. SGGA05 ◽  
Author(s):  
Ryota Suenaga ◽  
Masashi Suzuki ◽  
Shoji Kakio ◽  
Yuji Ohashi ◽  
Mototaka Arakawa ◽  
...  

1982 ◽  
pp. 101-111 ◽  
Author(s):  
Jun-ichi Kushibiki ◽  
Akira Ohkubo ◽  
Noriyoshi Chubachi

Sign in / Sign up

Export Citation Format

Share Document