Measurement of micro-hole with high aspect ratio by double optical fibers coupling

2008 ◽  
Author(s):  
Jiwen Cui ◽  
Jiubin Tan ◽  
Fei Wang ◽  
Chuanxi Song
2010 ◽  
Vol 42 ◽  
pp. 13-16
Author(s):  
Wei Li ◽  
Ping Mei Ming ◽  
Wu Ji Jiang ◽  
Yin Ding Lv

In this paper, the influences of applied magnetic field on flow state during electroforming of the high-aspect-ratio (HAR) blind micro-hole were numerically analyzed using the Fluent software. The results showed that, when microelectroforming of nickel without external agitation, three vortexes could form due to the magnetohydrodynamic (MHD) effect within the HAR micro-hole with magnetic field in parallel to cathode-electrode surface, and the flow rate in the micro-hole increased with the increase of the magnetic field and current density. The MHD effect helped to enhance mass transfer during the microelectroforming of HAR microstructures.


CIRP Annals ◽  
2009 ◽  
Vol 58 (1) ◽  
pp. 213-216 ◽  
Author(s):  
Z.Y. Yu ◽  
Y. Zhang ◽  
J. Li ◽  
J. Luan ◽  
F. Zhao ◽  
...  

2019 ◽  
Vol 7 (1) ◽  
Author(s):  
Senwang Lei ◽  
Zuyuan Yu ◽  
Kai Zhou ◽  
Jianzhong Li ◽  
Renke Kang

The micro-ultrasonic machining (USM) is suitable for machining hard and brittle materials. When a micro hole is drilled deeply using micro-USM, machining speed slows down and the breakage of micro tool may occur. To solve this problem, this paper proposes the application the planetary movement of micro tool in high-aspect ratio micro holes drilling by micro-USM. The micro holes of about 92 μm in diameter with an aspect ratio larger than ten have been machined. The processing efficiency has been improved. The influence of planetary movement parameters on processing efficiency has been investigated


Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 17
Author(s):  
Zhixiang Zou ◽  
Zhongning Guo ◽  
Qinming Huang ◽  
Taiman Yue ◽  
Jiangwen Liu ◽  
...  

Micro-electrical discharge machining (micro-EDM) is a good candidate for processing micro-hole arrays, which are critical features of micro-electro-mechanical systems (MEMS), diesel injector nozzles, inkjet printheads and turbine blades, etc. In this study, the wire vibration of the wire electro-discharge grinding (WEDG) system has been analyzed theoretically, and, accordingly, an improved WEDG method was developed to fabricate micron-scale diameter and high-aspect-ratio microelectrodes for the in-process micro-EDM of hole array with hole diameter smaller than 20 μm. The improved method has a new feature of a positioning device to address the wire vibration problem, and thus to enhance microelectrodes fabrication precision. Using this method, 14 μm diameter microelectrodes with less than 0.4 μm deviation and an aspect ratio of 142, which is the largest aspect ratio ever reported in the literature, were successfully fabricated. These microelectrodes were then used to in-process micro-EDM of hole array in stainless steel. The effects of applied voltage, current and pulse frequency on hole dimensional accuracy and microelectrode wear were investigated. The optimal processing parameters were selected using response–surface experiments. To improve machining accuracy, an in-process touch-measurement compensation strategy was applied to reduce the cumulative compensation error of the micro-EDM process. Using such a system, micro-hole array (2 × 80) with average entrance diameter 18.91 μm and average exit diameter 17.65 μm were produced in 50 μm thickness stainless steel sheets, and standard deviations of hole entrance and exit sides of 0.44 and 0.38 μm, respectively, were achieved.


Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1864 ◽  
Author(s):  
Changrui Wang ◽  
Zhen Lu ◽  
Kaifeng Zhang

The present study investigated high-aspect ratio micro-hole array parts which were made by ZrO2 micro-powder with different particle sizes and micro-powder injection molding technology. It analysed the influence of particle sizes on feedstock, debinding and sintering of ceramic nozzles with multi-micro-holes. The forming quality of ceramic nozzles with multi-micro-holes was discussed in this paper. The results show that the two mixed ZrO2 feedstocks have fine uniformity. The average deviation of the feedstock made with 200 nm powder was −2%, and the average deviation of the feedstock made with 100 nm powder was −7.1%. The sample showed certain sintering characteristics which provided better strength (11.10 MPa) to parts after debinding. The linear shrinkage and the density of the two powder samples at different sintering temperatures increased as the sintering temperature increased. If the temperature continued to increase, the linear shrinkage and the density decreased. The highest hardness and flexural strength values of the ZrO2 sample with 200 nm powder used were: 1265.5 HV and 453.4 MPa, and the crystalline particle size was 0.36 μm. The highest hardness and flexural strength values of the ZrO2 sample with 100 nm powder used were: 1425.8 HV and 503.6 MPa, and the crystalline particle size was 0.18 μm. The ceramic nozzles with multi-micro holes shrunk to nearly the same axial, radial and circumferential directions during sintering. After sintering, the roundness of ceramic micro-hole met the user requirements, and the circular hole had a high parallelism in the axial direction. The micropore diameter was 450 ± 5 μm, and it was possible to control the dimensional accuracy within 1.5% after sintering. The study presented a superior application prospect for high-aspect ratio micro hole array parts in aerospace, electronics and biomedicine.


2016 ◽  
Vol 109 ◽  
pp. 61-66 ◽  
Author(s):  
Cheng-Yu Li ◽  
Jun-Jie Yang ◽  
Wen-Ta Tsai ◽  
Chang-Jian Lin ◽  
Tso-Fu Mark Chang ◽  
...  

2013 ◽  
Vol 5 (4) ◽  
Author(s):  
Jay Tu ◽  
Ted Lehman ◽  
Alexander G. Paleocrassas ◽  
Wm. Ray Harp ◽  
Satoru Noguchi ◽  
...  

2003 ◽  
Vol 2003 (0) ◽  
pp. 169-170
Author(s):  
Akiko TANAKA ◽  
Yusuke KUMAGAI ◽  
Hiroshi EDA ◽  
Libo ZHOU

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