Influence of the Planetary Movement of Tool on the Aspect Ratio of Micro Holes Machined by Micro-Ultrasonic Machining

2019 ◽  
Vol 7 (1) ◽  
Author(s):  
Senwang Lei ◽  
Zuyuan Yu ◽  
Kai Zhou ◽  
Jianzhong Li ◽  
Renke Kang

The micro-ultrasonic machining (USM) is suitable for machining hard and brittle materials. When a micro hole is drilled deeply using micro-USM, machining speed slows down and the breakage of micro tool may occur. To solve this problem, this paper proposes the application the planetary movement of micro tool in high-aspect ratio micro holes drilling by micro-USM. The micro holes of about 92 μm in diameter with an aspect ratio larger than ten have been machined. The processing efficiency has been improved. The influence of planetary movement parameters on processing efficiency has been investigated

2008 ◽  
Vol 389-390 ◽  
pp. 264-270 ◽  
Author(s):  
T. Tateishi ◽  
Nobuhito Yoshihara ◽  
Ji Wang Yan ◽  
Tsunemoto Kuriyagawa

Ultrasonic machining (USM) is an effective method for machining of hard brittle materials. In this process, the slurry is supplied to the gap between the workpiece and the ultrasonic vibrating tool, and the materials are removed by the impacts of the abrasive grains that are pressurized by an ultrasonic vibrating tool. The purpose of this research is to achieve precise and efficient microfabrication on hard brittle materials by USM. However, in the case of microfabrication, chipping which is generally observed around the edges of machined micro holes and grooves, deteriorates the machining accuracy. In addition, there is another problem in that the machining efficiency decreases with the progress of the machining. Electrorheological fluid-assisted USM has been proposed as a countermeasure to these problems. In the present study, the problems and countermeasures associated with the machining of high-aspect ratio micro holes in hard brittle materials by electrorheological fluid-assisted USM are investigated. By positioning an auxiliary electrode under the workpiece, it becomes possible to keep the electric field high even when the machining depth becomes large. As a result, high-precision and high-aspect ratio micro holes can be machined on hard brittle materials.


Author(s):  
Ronnie Mathew ◽  
Sagil James ◽  
M. M. Sundaram

Accurate and precise micro tools are essential for the micromachining of highly complex features in a wide variety of engineering materials including metals and ceramics. Simple shapes like cylindrical rods with micrometer level dimensions are increasingly being used as micro tools in processes such as micro ultrasonic machining. High aspect ratio tools are necessary to produce deep micro holes and other high aspect ratio structures. Micro tools produced by the well known wire electro-discharge grinding suffer from deformation due to the thermal stresses. Therefore, alternate micro tool manufacturing techniques are being explored actively. In this paper, the manufacturing of micro tools by micro electrochemical machining (ECM) is discussed. The micro tools are made under different experimental conditions using an in-house built micro electrochemical machining system and analyzed for tool tip radii and cone angles. Further, the feasibility of extremely high aspect ratio micro tools is studied. Using micro ECM, micro tools having mean diameters of 10 microns with tips as small as 50 nm and aspect ratios of the order of 300 are achieved.


Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1864 ◽  
Author(s):  
Changrui Wang ◽  
Zhen Lu ◽  
Kaifeng Zhang

The present study investigated high-aspect ratio micro-hole array parts which were made by ZrO2 micro-powder with different particle sizes and micro-powder injection molding technology. It analysed the influence of particle sizes on feedstock, debinding and sintering of ceramic nozzles with multi-micro-holes. The forming quality of ceramic nozzles with multi-micro-holes was discussed in this paper. The results show that the two mixed ZrO2 feedstocks have fine uniformity. The average deviation of the feedstock made with 200 nm powder was −2%, and the average deviation of the feedstock made with 100 nm powder was −7.1%. The sample showed certain sintering characteristics which provided better strength (11.10 MPa) to parts after debinding. The linear shrinkage and the density of the two powder samples at different sintering temperatures increased as the sintering temperature increased. If the temperature continued to increase, the linear shrinkage and the density decreased. The highest hardness and flexural strength values of the ZrO2 sample with 200 nm powder used were: 1265.5 HV and 453.4 MPa, and the crystalline particle size was 0.36 μm. The highest hardness and flexural strength values of the ZrO2 sample with 100 nm powder used were: 1425.8 HV and 503.6 MPa, and the crystalline particle size was 0.18 μm. The ceramic nozzles with multi-micro holes shrunk to nearly the same axial, radial and circumferential directions during sintering. After sintering, the roundness of ceramic micro-hole met the user requirements, and the circular hole had a high parallelism in the axial direction. The micropore diameter was 450 ± 5 μm, and it was possible to control the dimensional accuracy within 1.5% after sintering. The study presented a superior application prospect for high-aspect ratio micro hole array parts in aerospace, electronics and biomedicine.


Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 675 ◽  
Author(s):  
Yung-Yi Wu ◽  
Tzu-Wei Huang ◽  
Dong-Yea Sheu

Tungsten cemented carbide (WC-Co) is a widely applied material in micro-hole drilling, such as in suction nozzles, injection nozzles, and wire drawing dies, owing to its high wear resistance and hardness. Since the development of wire-electro-discharge grinding (WEDG) technology, the micro-electrical discharge machining (micro-EDM) has been excellent in the process of fabricating micro-holes in WC-Co material. Even though high-quality micro-holes can be drilled by micro-EDM, it is still limited in large-scale production, due to the electrode tool wear caused during the process. In addition, the high cost of precision micro-EDM is also a limitation for WC-Co micro-hole drilling. This study aimed to develop a low-cost desktop micro-EDM system for fabricating micro-holes in tungsten cemented carbide materials. Taking advantage of commercial micro tools in a desktop micro-EDM system, it is possible to reach half the amount of large-scale production of micro-holes. Meanwhile, it is difficult to drill the deep and high aspect ratio micro-holes using conventional micro-EDM, therefore, a cut-side micro-tool shaped for micro-EDM system drilling was exploited in this study. The results show that micro-holes with a diameter of 0.07 mm and thickness of 1.0 mm could be drilled completely by cut-side micro-tools. The roundness of the holes were approximately 0.001 mm and the aspect ratio was close to 15.


2010 ◽  
Vol 42 ◽  
pp. 13-16
Author(s):  
Wei Li ◽  
Ping Mei Ming ◽  
Wu Ji Jiang ◽  
Yin Ding Lv

In this paper, the influences of applied magnetic field on flow state during electroforming of the high-aspect-ratio (HAR) blind micro-hole were numerically analyzed using the Fluent software. The results showed that, when microelectroforming of nickel without external agitation, three vortexes could form due to the magnetohydrodynamic (MHD) effect within the HAR micro-hole with magnetic field in parallel to cathode-electrode surface, and the flow rate in the micro-hole increased with the increase of the magnetic field and current density. The MHD effect helped to enhance mass transfer during the microelectroforming of HAR microstructures.


2020 ◽  
Vol 35 (11) ◽  
pp. 1188-1203 ◽  
Author(s):  
Ramver Singh ◽  
Akshay Dvivedi ◽  
Pradeep Kumar

2009 ◽  
Vol 626-627 ◽  
pp. 321-326
Author(s):  
Bao Xian Jia ◽  
D.S. Wang ◽  
Jing Zhe Guo

In order to obtain micro holes with high aspect ratio, a new technique of machining deep micro holes by combining EDM (Electrical Discharge Machining) with USM (Ultrasonic Machining) in inversion installing is researched. The workpiece is over the electrode. The ultrasonic vibration is affixed to the electrode. The workpiece and electrode are all immersed in working liquid. The debris generated by EDM is dropped out the hole from the gap between the electrode and the hole wall by the gravity and the pumping effect of ultrasonic vibration, so as to increasing the machining velocity and machined depth. The structural features of the machining device are described, and the exploratory experiment is carried out. The corresponding process relations are found out, which can provide references for further study of this technique. The micro holes with larger than 25 in aspect ratio are machined.


Author(s):  
Yinfei Yang ◽  
Jinjin Han ◽  
Xiuqing Hao ◽  
Liang Li ◽  
Ning He

High aspect ratio micro-grooves are critical structures in the micro-electromechanical system. However, problems like rapid tool wear, low processing efficiency, and inferior machined quality in micro-milling of high aspect ratio micro-grooves by length–diameter ratio tools are particularly significant. In this work, a combined micro-milling method based on water-free alcohol as the cutting fluid and laser deburring is proposed to investigate the high aspect ratio micro-groove generation of oxygen-free high-conductivity copper TU1. Parametric experiments and high aspect ratio micro-groove experiments were conducted to investigate the surface quality, cutting forces, and tool wear. The water-free alcohol was employed to improve the tool life and machined surface quality. In the case of the oxygen-free high-conductivity copper TU1 material, a satisfactory high aspect ratio micro-groove (groove-width = 0.2 μm and aspect ratio = 2.5) with a nanoscale surface roughness ( Ra = 68 nm) was obtained under the preferred machining conditions. Furthermore, the deburring process of the high aspect ratio micro-groove by the laser technology was conducted to achieve ideal machined quality of the top surfaces.


2008 ◽  
Author(s):  
Jiwen Cui ◽  
Jiubin Tan ◽  
Fei Wang ◽  
Chuanxi Song

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