Study on imaging characterization of ArF high index immersion lithography

2008 ◽  
Author(s):  
Sarohan Park ◽  
Jun-Taek Park ◽  
Kilyoung Lee ◽  
Tae-Seung Eom ◽  
Jin-Soo Kim ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography ◽  
Imaging Characterization

Feasibility of 37-nm half-pitch with ArF high-index immersion lithography

2007 ◽  
Author(s):  
Yoshiyuki Sekine ◽  
Miyoko Kawashima ◽  
Eiji Sakamoto ◽  
Keita Sakai ◽  
Akihiro Yamada ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography

scholarly journals Novel high-index resists for 193-nm immersion lithography and beyond

2007 ◽  
Author(s):  
Idriss Blakey ◽  
Lan Chen ◽  
Bronwin Dargaville ◽  
Heping Liu ◽  
Andrew Whittaker ◽  
...  
Keyword(s):  
High Index ◽  
Immersion Lithography ◽  
193 Nm

Elastomeric Polymers. 2. NMR and NMR Imaging Characterization of Cross-Linked PDMS

2002 ◽  
Vol 35 (5) ◽  
pp. 1722-1729 ◽  
Author(s):  
Maristella Gussoni ◽  
Fulvia Greco ◽  
Marina Mapelli ◽  
Alessandra Vezzoli ◽  
Elisabetta Ranucci ◽  
...  
Keyword(s):  
Nmr Imaging ◽  
Imaging Characterization

Preparation and characterization of microstructured silica holey fibers filled with high-index glasses

2011 ◽  
Author(s):  
J. Kobelke ◽  
R. Spittel ◽  
D. Hoh ◽  
K. Schuster ◽  
A. Schwuchow ◽  
...  
Keyword(s):  
High Index

scholarly journals Imaging characterization of a multi-energy CT with quasi-monochromatic X-ray source

2011 ◽  
Author(s):  
Pier Luca Rossi ◽  
Lucia Andreani ◽  
Dante Bollini ◽  
Marco Bontempi ◽  
Stefano Cappelli ◽  
...  
Keyword(s):  
X Ray ◽  
Imaging Characterization

Photoluminescence imaging characterization of thin-film InP

2015 ◽  
Author(s):  
Steve Johnston ◽  
Alyssa Allende Motz ◽  
James Moore ◽  
Maxwell Zheng ◽  
Ali Javey ◽  
...  
Keyword(s):  
Thin Film ◽  
Imaging Characterization
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