Prediction of imaging performance of immersion lithography using high refractive index fluid

2008 ◽  
Author(s):  
Takashi Sato ◽  
Masamitsu Itoh ◽  
Akiko Mimotogi ◽  
Shoji Mimotogi ◽  
Kazuya Sato ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
Imaging Performance

scholarly journals High Refractive Index Fluid for Next Generation ArF Immersion Lithography

2006 ◽  
Vol 19 (5) ◽  
pp. 641-646 ◽  
Author(s):  
Taiichi Furukawa ◽  
Katsuhiko Hieda ◽  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Kinji Yamada ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

scholarly journals Coated High-Refractive-Index Barium Titanate Glass Microspheres for Optically Trapped Microsphere Super-Resolution Microscopy: A Simulation Study

Photonics ◽  
2020 ◽  
Vol 7 (4) ◽  
pp. 84
Author(s):  
Xi Liu ◽  
Song Hu ◽  
Yan Tang
Keyword(s):  
Refractive Index ◽  
Barium Titanate ◽  
Optical Trapping ◽  
Super Resolution ◽  
High Refractive Index ◽  
Trapping Efficiency ◽  
Single Beam ◽  
Imaging Performance ◽  
Super Resolution Microscopy ◽  
Optically Trapped

As water is normally used as the immersion medium in optically trapped microsphere microscopy, the high-refractive-index barium titanate glass (BTG) microsphere shows a better imaging performance than the low-index polystyrene (PS) or melamine formaldehyde (MF) microsphere, but it is difficult to be trapped by single-beam optical trapping due to its overly high refractive index. In this study, coated BTG microspheres with a PS coating have been computationally explored for the combination of optical trapping with microsphere-assisted microscopy. The PS coating thickness affects both the optical trapping efficiency and photonic nanojet (PNJ) property of the coated BTG sphere. Compared to the uncoated BTG sphere, the coated BTG sphere with a proper PS coating thickness has a highly improved trapping efficiency which enables single-beam optical trapping, and a better PNJ with a higher optical intensity Imax and a narrower full width at half maximum (FWHM) corresponding to better imaging performance. These coated BTG spheres also have an advantage in trapping efficiency and imaging performance over conventional PS and MF spheres. The coated BTG microsphere is highly desirable for optically trapped microsphere super-resolution microscopy and potentially beneficial to other research areas, such as nanoparticle detection.

High refractive index materials design for the next generation ArF immersion lithography

2008 ◽  
Author(s):  
Taiichi Furukawa ◽  
Takanori Kishida ◽  
Kyouyuu Yasuda ◽  
Tsutomu Shimokawa ◽  
Zhi Liu ◽  
...  
Keyword(s):  
Refractive Index ◽  
Materials Design ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

High refractive index fluids for second-generation 193-nm immersion lithography

2007 ◽  
Author(s):  
Akifumi Kagayama ◽  
Hiroko Wachi ◽  
Yoshimichi Namai ◽  
Shin Fukuda
Keyword(s):  
Refractive Index ◽  
Second Generation ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

High refractive index nanoparticle fluids for 193-nm immersion lithography

2009 ◽  
Author(s):  
Markos Trikeriotis ◽  
Robert Rodriguez ◽  
Michael F. Zettel ◽  
Aristeidis Bakandritsos ◽  
Woo Jin Bae ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm

Novel high refractive index fluids for 193nm immersion lithography

2006 ◽  
Author(s):  
Julius Santillan ◽  
Akihiko Otoguro ◽  
Toshiro Itani ◽  
Kiyoshi Fujii ◽  
Akifumi Kagayama ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography

Material design for immersion lithography with high refractive index fluid (HIF)

2005 ◽  
Author(s):  
Takashi Miyamatsu ◽  
Yong Wang ◽  
Motoyuki Shima ◽  
Shiro Kusumoto ◽  
Takashi Chiba ◽  
...  
Keyword(s):  
Refractive Index ◽  
Material Design ◽  
High Refractive Index ◽  
Immersion Lithography

High-refractive-index fluids for the next-generation ArF immersion lithography

2006 ◽  
Author(s):  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Taiichi Furukawa ◽  
Kinji Yamada ◽  
Tetsuo Tominaga ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

A study of 193-nm immersion lithography using novel high refractive index fluids

2006 ◽  
Vol 83 (4-9) ◽  
pp. 651-654 ◽  
Author(s):  
Julius Santillan ◽  
Akihiko Otoguro ◽  
Toshiro Itani ◽  
Kiyoshi Fujii ◽  
Akifumi Kagayama ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
193 Nm
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