White-light spectral interferometric technique used to measure thickness of thin films

2007 ◽  
Author(s):  
P. Hlubina ◽  
D. Ciprian ◽  
R. Clebus ◽  
J. Luňáček ◽  
M. Lesňák
2016 ◽  
Vol 120 (30) ◽  
pp. 17069-17080 ◽  
Author(s):  
Randy D. Mehlenbacher ◽  
Thomas J. McDonough ◽  
Nicholas M. Kearns ◽  
Matthew J. Shea ◽  
Yongho Joo ◽  
...  

2007 ◽  
Vol 125 (1-2) ◽  
pp. 85-91 ◽  
Author(s):  
M. Godlewski ◽  
M. Skrobot ◽  
E. Guziewicz ◽  
M.R. Phillips

2007 ◽  
Vol 364-366 ◽  
pp. 80-85
Author(s):  
Su Ping Chang ◽  
Tie Bang Xie ◽  
Xuang Ze Wang ◽  
Jun Guo

White-light interferometric technique has been widely applied in the measurement of three-dimensional profiles and roughness with high-precision. Based on the characteristic of interferometric technique, a new method combined with image location and a three-dimensional stage is proposed to achieve the non-contact absolute shape measurement for aspheric and spherical surface in a slarge range. The interference fringes vary with the horizontal displacement of the measured surface, the surface information was obtained by locating the transformation of the maximal intensity in the interferograms. Two main influence factors are discussed; they are performance of the inerferimetric microscope and the stage. Since the performance of the stage directly determines the measurement precision, a three-dimensional displacement stage with a large range and a high precision was developed. Some experiments were carried out to verify the performance of the three-dimensional displacement stage and the validity of the new measurement method with satisfactory results.


2004 ◽  
Author(s):  
Hua-Chen Hsu ◽  
Chi-Hong Tung ◽  
Ching-Fen Kao ◽  
Calvin C. Chang

2018 ◽  
Vol 196 ◽  
pp. 504-510 ◽  
Author(s):  
Zahra Khatami ◽  
Patrick R.J. Wilson ◽  
Jacek Wojcik ◽  
Peter Mascher

2016 ◽  
Vol 7 (11) ◽  
pp. 2024-2031 ◽  
Author(s):  
Randy D. Mehlenbacher ◽  
Jialiang Wang ◽  
Nicholas M. Kearns ◽  
Matthew J. Shea ◽  
Jessica T. Flach ◽  
...  

2009 ◽  
Vol 7 (5) ◽  
pp. 446-448 ◽  
Author(s):  
薛晖 Hui Xue ◽  
沈伟东 Weidong Shen ◽  
顾培夫 Peifu Gu ◽  
罗震岳 Zhenyue Luo ◽  
章岳光 Yueguang Zhang ◽  
...  

2006 ◽  
Vol 88 (18) ◽  
pp. 181107 ◽  
Author(s):  
Emmanouil Lioudakis ◽  
Andreas Othonos ◽  
A. G. Nassiopoulou

2015 ◽  
Vol 48 (4) ◽  
pp. 190-199 ◽  
Author(s):  
Stephanie L. Plazibat ◽  
Stephen E. Swiontek ◽  
Akhlesh Lakhtakia ◽  
Reena Roy

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