A white-light profiling algorithm adopting the multiwavelength interferometric technique

2004 ◽  
Author(s):  
Hua-Chen Hsu ◽  
Chi-Hong Tung ◽  
Ching-Fen Kao ◽  
Calvin C. Chang
Keyword(s):  
White Light ◽  
Interferometric Technique

Absolute Measurement of Aspheric Surfaces Using White-Light Interferometry

2007 ◽  
Vol 364-366 ◽  
pp. 80-85
Author(s):  
Su Ping Chang ◽  
Tie Bang Xie ◽  
Xuang Ze Wang ◽  
Jun Guo
Keyword(s):  
High Precision ◽  
White Light ◽  
Spherical Surface ◽  
Three Dimensional ◽  
Influence Factors ◽  
Horizontal Displacement ◽  
Absolute Measurement ◽  
Aspheric Surfaces ◽  
Interferometric Technique ◽  
Main Influence

White-light interferometric technique has been widely applied in the measurement of three-dimensional profiles and roughness with high-precision. Based on the characteristic of interferometric technique, a new method combined with image location and a three-dimensional stage is proposed to achieve the non-contact absolute shape measurement for aspheric and spherical surface in a slarge range. The interference fringes vary with the horizontal displacement of the measured surface, the surface information was obtained by locating the transformation of the maximal intensity in the interferograms. Two main influence factors are discussed; they are performance of the inerferimetric microscope and the stage. Since the performance of the stage directly determines the measurement precision, a three-dimensional displacement stage with a large range and a high precision was developed. Some experiments were carried out to verify the performance of the three-dimensional displacement stage and the validity of the new measurement method with satisfactory results.

White-light spectral interferometric technique used to measure thickness of thin films

2007 ◽  
Author(s):  
P. Hlubina ◽  
D. Ciprian ◽  
R. Clebus ◽  
J. Luňáček ◽  
M. Lesňák
Keyword(s):  
Thin Films ◽  
White Light ◽  
Interferometric Technique

scholarly journals Direct measurement of group dispersion of optical components using white-light spectral interferometry

2007 ◽  
Vol 15 (3) ◽  
Author(s):  
R. Chlebus ◽  
P. Hlubina ◽  
D. Ciprian
Keyword(s):  
Direct Measurement ◽  
White Light ◽  
Path Length ◽  
Michelson Interferometer ◽  
Optical Components ◽  
Interferometric Technique ◽  
Wide Wavelength Range ◽  
Path Length Difference ◽  
Group Refractive Index ◽  
Resolution Spectrometer

AbstractWe present a simple white-light spectral interferometric technique employing a low-resolution spectrometer for a direct measurement of the group dispersion of optical components over a wide wavelength range. The technique utilizes an unbalanced Mach-Zehnder interferometer with a component under test inserted in one arm and the other arm with adjustable path length. We record a series of spectral interferograms to measure the equalization wavelength as a function of the path length difference. We measure the absolute group refractive index as a function of wavelength for a quartz crystal of known thickness and the relative one for optical fiber. In the latter case we use a microscope objective in front and a lens behind the fiber and subtract their group dispersion, which is measured by a technique of tandem interferometry including also a Michelson interferometer.

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