Modeling and performance metrics for longitudinal chromatic aberrations, focus-drilling, and Z-noise: exploring excimer laser pulse-spectra

2007 ◽  
Author(s):  
Mark Smith ◽  
Joseph Bendik ◽  
Ivan Lalovic ◽  
Nigel Farrar ◽  
William Howard ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Performance Metrics ◽  
Excimer Laser Pulse ◽  
Chromatic Aberrations ◽  
And Performance

Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating

1997 ◽  
Vol 42 (21) ◽  
pp. 1787-1792
Author(s):  
Guipeng Luo ◽  
Haiming Wu ◽  
Mu Wang ◽  
Shining Zhu ◽  
Yanqing Lu ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Surface Structures ◽  
Phase Mask ◽  
Periodic Surface ◽  
Silica Phase ◽  
Excimer Laser Pulse

scholarly journals PHOTOLYSIS OF SOLID Na+C222.Na- BY AN EXCIMER LASER PULSE AT 308 nm

1991 ◽  
Vol 01 (C5) ◽  
pp. C5-297-C5-301
Author(s):  
M. G. DE BACKER ◽  
J. F. LACARRIERE ◽  
F. X. SAUVAGE
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Excimer Laser Pulse

Extreme ultraviolet line emission at 24.7 nm from Li‐like nitrogen plasma produced by a short KrF excimer laser pulse

1996 ◽  
Vol 69 (7) ◽  
pp. 884-886 ◽  
Author(s):  
N. S. Kim ◽  
A. Djaoui ◽  
M. H. Key ◽  
D. Neely ◽  
S. G. Preston ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Extreme Ultraviolet ◽  
Line Emission ◽  
Nitrogen Plasma ◽  
Excimer Laser Pulse ◽  
Krf Excimer Laser

Threshold for Single Excimer Laser Pulse Backside Removal of Thin Metal Films from Optical Quartz

1988 ◽  
Vol 100 ◽  
Author(s):  
R. J. Baseman ◽  
J. C. Andreshak
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Boiling Point ◽  
Laser Energy ◽  
Minimum Energy ◽  
Gold Surface ◽  
Metal Films ◽  
Gold Films ◽  
Element Calculation ◽  
Excimer Laser Pulse

ABSTRACTThe minimum energy in a 248 nm, 25 ns long excimer laser pulse required to remove thin Au and Cr films from optical quartz has been measured. Heating of the films by the laser has been modelled with a finite element calculation. Assuming that at threshold, all of the laser energy contributes to film removal, the calculations show that the gold films are removed when the heated gold surface reaches the atmospheric boiling point, and that temperatures well in excess of the atmospheric boiling point are required to remove the Cr films, with the required temperatures increasing with film thickness.

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