Extreme ultraviolet line emission at 24.7 nm from Li‐like nitrogen plasma produced by a short KrF excimer laser pulse

1996 ◽  
Vol 69 (7) ◽  
pp. 884-886 ◽  
Author(s):  
N. S. Kim ◽  
A. Djaoui ◽  
M. H. Key ◽  
D. Neely ◽  
S. G. Preston ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Extreme Ultraviolet ◽  
Line Emission ◽  
Nitrogen Plasma ◽  
Excimer Laser Pulse ◽  
Krf Excimer Laser

Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating

1997 ◽  
Vol 42 (21) ◽  
pp. 1787-1792
Author(s):  
Guipeng Luo ◽  
Haiming Wu ◽  
Mu Wang ◽  
Shining Zhu ◽  
Yanqing Lu ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Surface Structures ◽  
Phase Mask ◽  
Periodic Surface ◽  
Silica Phase ◽  
Excimer Laser Pulse

scholarly journals PHOTOLYSIS OF SOLID Na+C222.Na- BY AN EXCIMER LASER PULSE AT 308 nm

1991 ◽  
Vol 01 (C5) ◽  
pp. C5-297-C5-301
Author(s):  
M. G. DE BACKER ◽  
J. F. LACARRIERE ◽  
F. X. SAUVAGE
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Excimer Laser Pulse

CRACKING AND EXFOLIATION OF TiO2 FILM IRRADIATED WITH EXCIMER LASER

2008 ◽  
Vol 15 (04) ◽  
pp. 473-479 ◽  
Author(s):  
H. X. QIAN ◽  
W. ZHOU ◽  
H. Y. ZHENG
Keyword(s):  
Excimer Laser ◽  
Laser Fluence ◽  
Single Pulse ◽  
Single Shot ◽  
Uv Laser ◽  
Original Surface ◽  
Excimer Laser Pulse ◽  
Surface Protrusion ◽  
Krf Excimer Laser ◽  
Effect Of Surface

TiO 2 film deposited on glass was irradiated in air with single-shot KrF excimer laser pulse. The surface roughened as the result of the laser ablation. It is further noted that single-pulse irradiation with fluence ranging from 400 to 1200 mJ/cm2 gave rise to protrusion of the irradiated surface above the original surface, which is in contrast to usual expectation that irradiated surface is below the unirradiated surface. The surface protrusion is mainly attributed to the effect of surface tension. At the laser fluence of 1000 mJ/cm2, cracks were formed in the irradiated area and severe film exfoliation was observed at the periphery of the irradiated area due to the release of internal stress. With higher laser fluence above 1000 mJ/cm2, patches of film were observed to peel off within the irradiated areas. Hydrodynamic ablation is proposed to account for film exfoliation. The observed phenomenon is useful for further understanding how TiO 2 film reacts to strong UV laser irradiation.

Threshold for Single Excimer Laser Pulse Backside Removal of Thin Metal Films from Optical Quartz

1988 ◽  
Vol 100 ◽  
Author(s):  
R. J. Baseman ◽  
J. C. Andreshak
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Boiling Point ◽  
Laser Energy ◽  
Minimum Energy ◽  
Gold Surface ◽  
Metal Films ◽  
Gold Films ◽  
Element Calculation ◽  
Excimer Laser Pulse

ABSTRACTThe minimum energy in a 248 nm, 25 ns long excimer laser pulse required to remove thin Au and Cr films from optical quartz has been measured. Heating of the films by the laser has been modelled with a finite element calculation. Assuming that at threshold, all of the laser energy contributes to film removal, the calculations show that the gold films are removed when the heated gold surface reaches the atmospheric boiling point, and that temperatures well in excess of the atmospheric boiling point are required to remove the Cr films, with the required temperatures increasing with film thickness.

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