Etch process monitoring by electron beam wafer inspection

2007 ◽  
Author(s):  
Luke Lin ◽  
Jia-Yun Chen ◽  
Wen-Yi Wong ◽  
Mark McCord ◽  
Alex Tsai ◽  
...  
Keyword(s):  
Electron Beam ◽  
Process Monitoring ◽  
Wafer Inspection

Detecting Defects in Cu Metallization Structures by Electron-Beam Wafer Inspection

2004 ◽  
Vol 151 (6) ◽  
pp. G440 ◽  
Author(s):  
Miyako Matsui ◽  
Cheng Zhaohui ◽  
Mari Nozoe ◽  
Katsuhiro Torii
Keyword(s):  
Electron Beam ◽  
Cu Metallization ◽  
Wafer Inspection

scholarly journals In-process monitoring of defect of electron beam welding by ultrasonic - A study on occurrence and prevention of defects of electron beam welding (Report 8)

1986 ◽  
Vol 4 (2) ◽  
pp. 340-346
Author(s):  
Hisanori Okamura ◽  
Tomohiko Shida ◽  
Soji Sasaki ◽  
Hirotoshi Kino ◽  
Takashi Matsuzaka ◽  
...  
Keyword(s):  
Electron Beam ◽  
Process Monitoring ◽  
Electron Beam Welding

Characterization of a new automated electron beam wafer inspection system

1995 ◽  
Author(s):  
Douglas Hendricks ◽  
Jack Y. Jau ◽  
Hans Dohse ◽  
Alan D. Brodie ◽  
William D. Meisburger
Keyword(s):  
Electron Beam ◽  
Inspection System ◽  
Wafer Inspection
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