Surface topography measurement based on color images processing in white light interferometry

Author(s):  
Tong Guo ◽  
Yue Gu ◽  
Jinping Chen ◽  
Xing Fu ◽  
Xiaotang Hu
2014 ◽  
Vol 34 (2) ◽  
pp. 0212003
Author(s):  
郭彤 Guo Tong ◽  
李峰 Li Feng ◽  
倪连峰 Ni Lianfeng ◽  
陈津平 Chen Jinping ◽  
傅星 Fu Xing ◽  
...  

2018 ◽  
Vol 45 (6) ◽  
pp. 0604001
Author(s):  
邓钦元 Deng Qinyuan ◽  
唐燕 Tang Yan ◽  
周毅 Zhou Yi ◽  
杨勇 Yang Yong ◽  
胡松 Hu Song

2011 ◽  
Vol 19 (7) ◽  
pp. 1612-1619
Author(s):  
邹文栋 ZOU Wen-dong ◽  
黄长辉 HUANG Chang-hui ◽  
郑玱 ZHENG Qiang ◽  
徐周珏 XU Zhou-jue ◽  
董娜 DONG Na

1992 ◽  
Vol 28 (6) ◽  
pp. 553 ◽  
Author(s):  
S. Chen ◽  
A.W. Palmer ◽  
K.T.V. Grattan ◽  
B.T. Meggitt

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2486
Author(s):  
Gert Behrends ◽  
Dirk Stöbener ◽  
Andreas Fischer

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.


1995 ◽  
Vol 114 (5-6) ◽  
pp. 386-392 ◽  
Author(s):  
L.A Ferreira ◽  
J.L Santos ◽  
F Farahi

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