Design and implementation of a nanometer phase-shifting interferometer for micro-surface profile measurement

Author(s):  
Wei Zhu ◽  
Wencai Jing ◽  
Hongxia Zhang ◽  
Dagong Jia ◽  
Yimo Zhang ◽  
...  
2019 ◽  
Vol 56 (4) ◽  
pp. 041102
Author(s):  
吴庆尉 Wu Qingwei ◽  
范海东 Fan Haidong ◽  
关键 Guan Jian ◽  
吴迎春 Wu Yingchun ◽  
吴学成 Wu Xuecheng

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