Characterization of imaging performance for immersion lithography at NA=0.93

2006 ◽  
Author(s):  
Dario Gil ◽  
Jaione Tirapu-Azpiroz ◽  
Ryan Deschner ◽  
Timothy Brunner ◽  
Carlos Fonseca ◽  
...  
Keyword(s):  
Immersion Lithography ◽  
Imaging Performance

Characterization of the imaging performance of a micro-CT system based on the photon counting XPAD3/Si hybrid pixel detectors

2016 ◽  
Vol 2 (2) ◽  
pp. 025003 ◽  
Author(s):  
F Cassol ◽  
M Dupont ◽  
C Kronland-Martinet ◽  
H Ouamara ◽  
A Dawiec ◽  
...  
Keyword(s):  
Photon Counting ◽  
Micro Ct ◽  
Pixel Detectors ◽  
Ct System ◽  
Imaging Performance

scholarly journals PO-0986: Characterization of in-beam MR imaging performance during proton beam irradiation

2018 ◽  
Vol 127 ◽  
pp. S547-S548
Author(s):  
A. Hoffmann ◽  
S. Gantz ◽  
P. Grossinger ◽  
L. Karsch ◽  
J. Pawelke ◽  
...  
Keyword(s):  
Mr Imaging ◽  
Proton Beam ◽  
Beam Irradiation ◽  
Proton Beam Irradiation ◽  
Imaging Performance

Prediction of imaging performance of immersion lithography using high refractive index fluid

2008 ◽  
Author(s):  
Takashi Sato ◽  
Masamitsu Itoh ◽  
Akiko Mimotogi ◽  
Shoji Mimotogi ◽  
Kazuya Sato ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Immersion Lithography ◽  
Imaging Performance

scholarly journals Non-contact characterization of compound optical elements using reflectance confocal microscopy, low-coherence interferometry, and computational ray-tracing

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Mohamed T. El-Haddad ◽  
Yuankai K. Tao
Keyword(s):  
Optical Design ◽  
Optical Elements ◽  
Validation Data ◽  
Industrial Manufacturing ◽  
Low Coherence ◽  
Research Systems ◽  
Low Coherence Interferometry ◽  
Imaging Performance ◽  
Non Destructive

AbstractAdvances in microscopy have enabled us to see at unprecedented depths and resolutions, even breaking the diffraction-limit by several fold. These improvements have come at the expense of system complexity with microscopes routinely employing multiple objective lenses and custom optical relays. Optimal system design is paramount for imaging performance, but research systems are limited by the use of commercial components because optical prescriptions are often inaccessible. System performance can be further degraded when these components are implemented in nonstandard configurations outside of manufacturer specifications. Here, we describe a method for characterization of compound optical elements including curvatures, material and air-gap thicknesses, and glass types. We present validation data for doublets and a commercial broadband scan lens. Our method is both non-contact and non-destructive, and we believe it addresses a unique gap in optical design that may be extended to broad applications in both research and industrial manufacturing.

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