Low-pressure reactive dc-magnetron sputter deposition of metal-oxide thin films

1992 ◽  
Author(s):  
Bradley J. Pond ◽  
Tu Du ◽  
J. Sobczak ◽  
Charles K. Carniglia ◽  
Forrest L. Williams
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Low Pressure ◽  
Sputter Deposition ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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