Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition

2010 ◽  
Vol 28 (4) ◽  
pp. 515-522 ◽  
Author(s):  
Kousik Sivakumar ◽  
S. M. Rossnagel
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Sputter Deposition ◽  
Oxide Thin Films ◽  
Magnetron Sputter Deposition ◽  
Aluminum Doped Zinc Oxide ◽  
Magnetron Sputter ◽  
Optical Applications

Low-pressure reactive dc-magnetron sputter deposition of metal-oxide thin films

1992 ◽  
Author(s):  
Bradley J. Pond ◽  
Tu Du ◽  
J. Sobczak ◽  
Charles K. Carniglia ◽  
Forrest L. Williams
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Low Pressure ◽  
Sputter Deposition ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Effect of film thickness on properties of aluminum doped zinc oxide thin films deposition on polymer substrate

2013 ◽  
Vol 24 (12) ◽  
pp. 5091-5096 ◽  
Author(s):  
Nihan Akin ◽  
S. Sebnem Cetin ◽  
Mehmet Cakmak ◽  
Tofig Memmedli ◽  
Suleyman Ozcelik
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Film Thickness ◽  
Polymer Substrate ◽  
Oxide Thin Films ◽  
Aluminum Doped Zinc Oxide
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