The effect of film thickness on the dissolution rate and hydrogen bonding behavior of photoresist polymer thin films
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2010 ◽
Vol 115
(3)
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pp. 1616-1621
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2004 ◽
Vol 31
(3)
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pp. 323-328
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2017 ◽
Vol 1
(10)
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pp. 2027-2030
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