Influence of film thickness, molecular weight, and substrate on the physical properties of photoresist polymer thin films

Author(s):  
Lovejeet Singh ◽  
Peter J. Ludovice ◽  
Clifford L. Henderson
2005 ◽  
Vol 890 ◽  
Author(s):  
Chunhua Li ◽  
Jun Jiang ◽  
Miriam J. Rafailovich ◽  
Jonathan C. Sokolov

ABSTRACTPreviously, we reported that the viscosity of a polymer film can be measured in situ by observing the liquid-liquid dewetting of polymer bilayer films. In this study, we use the technique to investigate the effect of film thickness and surface interactions on the effective viscosity of polymer thin films. We found that the effective viscosity increases dramatically with decreasing the film thickness. We attribute this to the pinning of the polymer chains at the strongly interacting polymer/Silicon interface.


Soft Matter ◽  
2020 ◽  
Vol 16 (16) ◽  
pp. 3886-3890 ◽  
Author(s):  
Shawn H. Chen ◽  
Amanda J. Souna ◽  
Christopher L. Soles ◽  
Stephan J. Stranick ◽  
Edwin P. Chan

In this work, a microballistic impact test called laser induced projectile impact test (LIPIT) was used to study the perforation behavior of polycarbonate thin films to demonstrate the importance of film thickness on the film's ballistic limit.


2014 ◽  
Vol 587 ◽  
pp. 582-587 ◽  
Author(s):  
Sajid Butt ◽  
Nazar Abbas Shah ◽  
Adnan Nazir ◽  
Zulfiqar Ali ◽  
Asghri Maqsood

2000 ◽  
Vol 629 ◽  
Author(s):  
Ratchana Limary ◽  
Peter F. Green

ABSTRACTSymmetric diblock copolymers undergo a disorder to order transition below a microphase separation transition temperature. In this temperature range the structure is characterized by alternating lamellae of thickness L. In thin film geometries, the lamellae are oriented normal to the substrate if there is a preferential interaction between either of the block constituents and the substrate/copolymer or copolymer/vacuum interfaces. Depending on the relation between the film thickness and L, the topography of the film might comprise of holes, islands or spinodal-like structures. We show that in a polystyrene-b-poly(methyl methacrylate) diblock copolymer of molecular weight 20, 000 g/mol, above the microphase separation transition temperature, the topography of the film depends on the thickness. A heirarchy of bicontinuous patterns and holes is observed with increasing film thickness for films thinner than 35 nm.


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