Advanced mask inspection optical system (AMOS) using 198.5-nm wavelength for 65-nm (hp) node and beyond: system development and initial state D/D inspection performance

Author(s):  
Toru Tojo ◽  
Ryoich Hirano ◽  
Hideo Tsuchiya ◽  
Junji Oaki ◽  
Takeshi Nishizaka ◽  
...  
1995 ◽  
Author(s):  
Anees Ahmad ◽  
Chen Feng ◽  
RamaGopal V. Sarepaka

2016 ◽  
Author(s):  
Ryoichi Hirano ◽  
Susumu Iida ◽  
Tsuyoshi Amano ◽  
Hidehiro Watanabe ◽  
Masahiro Hatakeyama ◽  
...  

2002 ◽  
Author(s):  
Heard S. Lowry III ◽  
William R. Simpson ◽  
Randy A. Nicholson ◽  
Frank L. Crosswy ◽  
James D. Selman, Jr.

1997 ◽  
Author(s):  
Igor V. Galakhov ◽  
V. A. Eroshenko ◽  
L. V. L'vov ◽  
Vasili M. Murugov ◽  
A. V. Ryadov ◽  
...  

2021 ◽  
pp. 2463-2473
Author(s):  
Raaid Noffi Hassan ◽  
Huda Shaker Ali ◽  
Wafaa Hikmat Wadee

     Numerical simulations were carried out to evaluate the effects of different aberrations modes on the performance of optical system, when observing and imaging the solar surface. Karhunen-Loeve aberrations modes were simulated as a wave front error in the aperture function of the optical system. To identify and apply the appropriate rectification that removes or reduces various types of aberration, their attribute must be firstly determined and quantitatively described. Wave aberration function is well suitable for this purpose because it fully characterizes the progressive effect of the optical system on the wave front passing through the aperture. The Karhunen-Loeve polynomials for circular aperture were used to describe wave front deviations and to predict the initial state of adaptive optics corrections. The results showed that increasing the aberration modes causes an increase in the blurring of the observed image. Also, we conclude that the optical phase error is increased significantly when aperture’s radii are increased.


1996 ◽  
Author(s):  
Mark T. Boies ◽  
Timothy D. Cole ◽  
Ashruf S. El-Dinary ◽  
R. Alan Reiter

2014 ◽  
Author(s):  
Ryoichi Hirano ◽  
Susumu Iida ◽  
Tsuyoshi Amano ◽  
Tsueno Terasawa ◽  
Hidehiro Watanabe ◽  
...  

1994 ◽  
Vol 17 (4) ◽  
pp. 693-707 ◽  
Author(s):  
Annette Karmiloff-Smith

AbstractBeyond modularityattempts a synthesis of Fodor's anticonstructivist nativism and Piaget's antinativist constructivism. Contra Fodor, I argue that: (1) the study of cognitive development is essential to cognitive science, (2) the module/central processing dichotomy is too rigid, and (3) the mind does not begin with prespecified modules; rather, development involves a gradual process of “modularization.” Contra Piaget, I argue that: (1) development rarely involves stagelike domain-general change and (2) domainspecific predispositions give development a small but significant kickstart by focusing the infant's attention on proprietary inputs. Development does not stop at efficient learning. A fundamental aspect of human development (“representational redescription”) is the hypothesized process by which information that isina cognitive system becomes progressively explicit knowledgetothat system. Development thus involves two complementary processes of progressive modularization and progressive “explicitation.” Empirical findings on the child as linguist, physicist, mathematician, psychologist, and notator are discussed in support of the theoretical framework. Each chapter concentrates first on the initial state of the infant mind/brain and on subsequent domain-specific learning in infancy and early childhood. It then goes on to explore data on older children's problem solving and theory building, with particular focus on evolving cognitive flexibility. Emphasis is placed throughout on the status of representations underlying different capacities and on the multiple levels at which knowledge is stored and accessible. Finally, consideration is given to the need for more formal developmental models, and a comparison is made between representational redescription and connectionist simulations of development. In conclusion, I consider what is special about human cognition by speculating on the status of representations underlying the structure of behavior in other species.


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