Using the aerial image measurement technique to speed up mask development for 193-nm immersion and polarization lithography

2005 ◽  
Author(s):  
Axel M. Zibold ◽  
Wolfgang Harnisch ◽  
Thomas Scheruebl ◽  
Norbert Rosenkranz ◽  
Joern Greif
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement ◽  
Speed Up ◽  
193 Nm

Aerial image measurement technique for fast evaluation of 193-nm lithography masks

2004 ◽  
Author(s):  
Axel M. Zibold ◽  
Thomas Scheruebl ◽  
Wolfgang Harnisch ◽  
Robert Brunner ◽  
J. Greif
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement ◽  
Fast Evaluation ◽  
193 Nm

Aerial image measurement technique for today's and future 193-nm lithography mask requirements

2004 ◽  
Author(s):  
Axel M. Zibold ◽  
Thomas Scheruebl ◽  
Alexander Menck ◽  
Robert Brunner ◽  
J. Greif
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement ◽  
193 Nm

Aerial image measurement technique for automated reticle defect disposition (ARDD) in wafer fabs

2004 ◽  
Author(s):  
Axel M. Zibold ◽  
Rainer M. Schmid ◽  
B. Stegemann ◽  
Thomas Scheruebl ◽  
Wolfgang Harnisch ◽  
...  
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement

scholarly journals Lateral Trochlear Inclination Angle: Measurement via a 2-Image Technique to Reliably Characterize and Quantify Trochlear Dysplasia

2020 ◽  
Vol 8 (10) ◽  
pp. 232596712095841
Author(s):  
Sheeba M. Joseph ◽  
Chris Cheng ◽  
Matthew J. Solomito ◽  
J. Lee Pace
Keyword(s):  
Measurement Technique ◽  
Trochlear Dysplasia ◽  
Intraclass Correlation ◽  
Single Image ◽  
Image Measurement ◽  
Mri Scan ◽  
Morphologic Characteristics ◽  
Mri Scans ◽  
Image Technique ◽  
Dejour Classification

Background: Trochlear dysplasia (TD) is a risk factor for patellar instability (PI). The Dejour classification categorizes TD but has suboptimal reliability. Lateral trochlear inclination (LTI) is a quantitative measurement of trochlear dysplasia on a single axial magnetic resonance imaging (MRI) scan. Hypothesis: A modified LTI measurement technique using 2 different axial MRI scans that reference the most proximal aspect of the trochlear cartilage on 1 image and the fully formed posterior condyles on the second image would be as reliable as and significantly different from the single-image measurement technique for LTI. Further, the 2-image LTI would adequately represent overall proximal trochlear morphologic characteristics. Study Design: Cohort study (diagnosis); Level of evidence, 2. Methods: Patients aged 9 to 18 years treated for PI between 2014 and 2017 were identified. The Dejour classification was radiographically determined. Single-image LTI was measured on a single axial MRI scan at the most proximal aspect of visible trochlear cartilage. A 2-image LTI was measured from 2 separate MRI scans: 1 at the most proximal aspect of trochlear cartilage and the second at the fully formed posterior condyles. This 2-image LTI was repeated at 3 subsequent levels (the first measurement is referred to as LTI-1; repeated measurements are LTI-2, LTI-3, and LTI-4, moving distally). In total, 65 patients met the inclusion criteria, and 30 were randomly selected for reliability analysis. Results: Inter- and intrarater reliability trended toward more variability for single-image LTI (intraclass correlation coefficient [ICC], 0.86 and 0.88, respectively) than for 2-image LTI (ICC, 0.97 and 0.96, respectively). The Dejour classification had lower intra- and interrater reliability (ICC, 0.31 and 0.73, respectively). Average single-image LTI (9.2° ± 12.6°) was greater than average 2-image LTI-1 (4.2° SD ± 11.9°) ( P = .0125). Single-image LTI classified 60% of patients with PI as having TD, whereas the 2-image LTI classified 71% as having TD. The 2-image LTI was able to capture 91% of overall proximal trochlear morphologic characteristics. Conclusion: LTI has higher reliability when performed using a 2-image measurement technique compared with single-image LTI and Dejour classification. The strong correlation between 2-image LTI and average LTI shows that 91% of TD is represented on the most proximal axial image. Because the single-image measurement appears to underestimate dysplasia, previously described thresholds should be reexamined using this 2-image technique to appropriately characterize TD.

Evaluation of volatile behaviour and the volatilization volume of molten salt in DIR-MCFC by using the image measurement technique

2005 ◽  
Vol 145 (2) ◽  
pp. 199-205 ◽  
Author(s):  
Kimihiko Sugiura ◽  
Makoto Yamauchi ◽  
Kazumi Tanimoto ◽  
Yasumasa Yoshitani
Keyword(s):  
Molten Salt ◽  
Measurement Technique ◽  
Image Measurement

Image measurement technique on vibration amplitude of ultrasonic horn

2013 ◽  
Author(s):  
Yong-bin Zhang ◽  
Zhi-qun Wu ◽  
Jian-ping Zhu ◽  
Jian-guo He ◽  
Guang-min Liu
Keyword(s):  
Measurement Technique ◽  
Vibration Amplitude ◽  
Image Measurement

Application of the aerial image measurement system (AIMS)TM to the analysis of binary mask imaging and resolution enhancement techniques

1994 ◽  
Author(s):  
Ronald M. Martino ◽  
Richard A. Ferguson ◽  
Russell A. Budd ◽  
John L. Staples ◽  
Lars W. Liebmann ◽  
...  
Keyword(s):  
Measurement System ◽  
Resolution Enhancement ◽  
Aerial Image ◽  
Binary Mask ◽  
Image Measurement

Aerial image measurement methods for fast aberration set-up and illumination pupil verification

2001 ◽  
Author(s):  
Hans van der Laan ◽  
Marcel Dierichs ◽  
Henk van Greevenbroek ◽  
Elaine McCoo ◽  
Fred Stoffels ◽  
...  
Keyword(s):  
Measurement Methods ◽  
Aerial Image ◽  
Image Measurement ◽  
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