Aerial image measurement methods for fast aberration set-up and illumination pupil verification

2001 ◽  
Author(s):  
Hans van der Laan ◽  
Marcel Dierichs ◽  
Henk van Greevenbroek ◽  
Elaine McCoo ◽  
Fred Stoffels ◽  
...  
Keyword(s):  
Measurement Methods ◽  
Aerial Image ◽  
Image Measurement ◽  
Set Up

Application of the aerial image measurement system (AIMS)TM to the analysis of binary mask imaging and resolution enhancement techniques

1994 ◽  
Author(s):  
Ronald M. Martino ◽  
Richard A. Ferguson ◽  
Russell A. Budd ◽  
John L. Staples ◽  
Lars W. Liebmann ◽  
...  
Keyword(s):  
Measurement System ◽  
Resolution Enhancement ◽  
Aerial Image ◽  
Binary Mask ◽  
Image Measurement

Actinic aerial image measurement tool for 157-nm mask qualification

2003 ◽  
Author(s):  
Takashi Yasui ◽  
Iwao Higashikawa ◽  
Peter Kuschnerus ◽  
Thomas Engel ◽  
Axel M. Zibold ◽  
...  
Keyword(s):  
Aerial Image ◽  
Measurement Tool ◽  
Image Measurement

New mask evaluation tool: the microlithography simulation microscope aerial image measurement system

1994 ◽  
Author(s):  
Russell A. Budd ◽  
Derek B. Dove ◽  
John L. Staples ◽  
H. Nasse ◽  
Wilhelm Ulrich
Keyword(s):  
Measurement System ◽  
Aerial Image ◽  
Evaluation Tool ◽  
Image Measurement

scholarly journals Distance Measurement Systems Using Lasers and Their Applications

2017 ◽  
Vol 9 (4) ◽  
pp. 33
Author(s):  
Joao Antonio Santos Dias Fonseca ◽  
Antonio Baptista ◽  
Ma Joao Martins ◽  
Joao Paulo N. Torres
Keyword(s):  
Future Development ◽  
Technological Progress ◽  
Distance Measurement ◽  
Measurement Methods ◽  
Measuring Systems ◽  
Measurement Systems ◽  
Advantages And Disadvantages ◽  
Set Up ◽  
Complex Methods ◽  
Methods Of Measurement

Optical measuring systems came to offer new ways to determine distances, deformations or vibrations through more accurate and greater range methods. Technological progress has allowed a significant improvement of several components, including the optical ones. Thus, the development of essential measurement methods is crucial to keep up with technological advances.In this paper, the three basic methods of measurement are studied – triangulation, telemetry and interferometry, covering their main applications, advantages and disadvantages, and theoretically substantiating each of the methods. The results of simulation routines for each method are shown along this work. For the triangulation method we made two experiments which demonstrate the functioning of the method in measuring distances and surfaces.For the telemetry method, experimental setups were studied to apply the method of pulse telemetry and phase comparison telemetry to measure distances,Thus, it is intended to set up the basis for the future development of more complex methods.

Aerial image measurement technique for fast evaluation of 193-nm lithography masks

2004 ◽  
Author(s):  
Axel M. Zibold ◽  
Thomas Scheruebl ◽  
Wolfgang Harnisch ◽  
Robert Brunner ◽  
J. Greif
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement ◽  
Fast Evaluation ◽  
193 Nm

Aerial image measurement technique for today's and future 193-nm lithography mask requirements

2004 ◽  
Author(s):  
Axel M. Zibold ◽  
Thomas Scheruebl ◽  
Alexander Menck ◽  
Robert Brunner ◽  
J. Greif
Keyword(s):  
Measurement Technique ◽  
Aerial Image ◽  
Image Measurement ◽  
193 Nm

A Method to Measure Discomfort of Static, Submaximal Force Exertion

1994 ◽  
Vol 38 (10) ◽  
pp. 678-682
Author(s):  
Brechtje J. Daams
Keyword(s):  
Measurement Method ◽  
Subjective Experience ◽  
Daily Life ◽  
Measurement Methods ◽  
Force Level ◽  
Point Scale ◽  
Endurance Time ◽  
Standard Measurement ◽  
Set Up ◽  
Half Minute

The degree of discomfort during force exertion is little investigated in literature. In daily life, however, comfort is an important aspect when using or operating products. It would therefore be useful for designers to know about the subjective experience of (dis)comfort during the exertion of submaximal forces by users of products. No standard measurement methods were found in literature. Two experiments have been carried out, using different methods. The first experiment was combined with the measurement of endurance time at different force levels and in four different postures. Subjects were asked every half minute to rate the discomfort they experienced on a five-point scale. Alas, the results generated by this method were found to be not sufficiently reproducible. The second experiment was set up in such a manner as to prevent subjects thinking explicitly about their feelings. This time, only one posture was investigated (pushing with the arm) and a spontaneous change of posture was taken as an indication of discomfort. The time to the first change increased consistently with lower force levels and these results proved to be sufficiently reproducible. Therefore this measurement method is recommended to get an idea about the level of discomfort experienced by subjects. A formula is given to indicate the relation found between the force level and the median of the time to the first change of hand.

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