Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

2005 ◽  
Author(s):  
Shunquan Wang ◽  
Changhe Zhou ◽  
Huayi Ru ◽  
Yanyan Zhang
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Technology ◽  
Optical Elements ◽  
Inductively Coupled

Induction Plasma Technology Applied to Powder Manufacturing: Example of Titanium-Based Materials

2016 ◽  
Vol 704 ◽  
pp. 282-286 ◽  
Author(s):  
Romain Vert ◽  
Remy Pontone ◽  
Richard Dolbec ◽  
Luc Dionne ◽  
M.I. Boulos
Keyword(s):  
Additive Manufacturing ◽  
Powder Metallurgy ◽  
Packing Density ◽  
Inductively Coupled Plasma ◽  
Manufacturing Industry ◽  
Critical Properties ◽  
Plasma Technology ◽  
High Quality ◽  
Inductively Coupled ◽  
Powder Manufacturing

Powder metallurgy technologies require specific powders to ensure a good quality to the manufactured parts. The critical properties are; the powder chemistry, flow ability, packing density, and the absence of porosity. This review highlights the capability of Tekna’s Inductively Coupled Plasma (ICP) technology for the production of high quality powders for the additive manufacturing industry.

scholarly journals Pancharatnam–Berry Optical Elements for Spin and Orbital Angular Momentum Division Demultiplexing

Photonics ◽  
2018 ◽  
Vol 5 (4) ◽  
pp. 46 ◽  
Author(s):  
Gianluca Ruffato ◽  
Pietro Capaldo ◽  
Michele Massari ◽  
Alessia Mezzadrelli ◽  
Filippo Romanato
Keyword(s):  
Angular Momentum ◽  
Orbital Angular Momentum ◽  
Silicon Substrate ◽  
Inductively Coupled Plasma ◽  
Optical Element ◽  
Variant Form ◽  
Optical Elements ◽  
Inductively Coupled ◽  
Grating Pattern ◽  
Spatially Variant

A Pancharatnam–Berry optical element is designed, fabricated, and optically characterized for the demultiplexing of beams with different polarization and orbital angular momentum states at the telecom wavelength of 1310 nm. The geometric phase control is achieved by fabricating properly-oriented subwavelength gratings on a silicon substrate, inducing a spatially-variant form birefringence. The digital grating pattern is transferred to the silicon substrate with a two-step nanofabrication protocol, using inductively coupled plasma reactive ion etching to transfer the resist pattern generated with high-resolution electron beam lithography. The optical characterization of the sample confirms the expected capability to sort circularly polarized optical beams with different handedness and orbital angular momentum. Encompassing optical element design and silicon photonics, the designed silicon metasurface paves the way to innovative devices for total angular momentum mode division multiplexing with unprecedented levels of integration.

Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology

2005 ◽  
Vol 44 (21) ◽  
pp. 4429 ◽  
Author(s):  
Shunquan Wang ◽  
Changhe Zhou ◽  
Huayi Ru ◽  
Yanyan Zhang
Keyword(s):  
Inductively Coupled Plasma ◽  
Fused Silica ◽  
Plasma Technology ◽  
Silica Phase ◽  
Inductively Coupled

Phase gratings made with inductively coupled plasma technology

2001 ◽  
Author(s):  
Changhe Zhou ◽  
Peng Xi ◽  
Enwen Dai ◽  
Liren Liu ◽  
Huayi Ru
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Technology ◽  
Inductively Coupled

scholarly journals Plasma Technology for Phosphogypsum Treatment

Energies ◽  
2021 ◽  
Vol 14 (18) ◽  
pp. 5813
Author(s):  
Imed Ghiloufi ◽  
Miqad S. Albishi ◽  
Ahmed A. Alharbi ◽  
Ibrahim A. AlShunaifi
Keyword(s):  
Inductively Coupled Plasma ◽  
Toxic Elements ◽  
Plasma Reactor ◽  
Plasma Current ◽  
Plasma Technology ◽  
X Ray ◽  
Inductively Coupled ◽  
Phosphate Industry ◽  
Xrf Scanning ◽  
Thermal Plasma Technology

The phosphate industry generates a large amount of waste called phosphogypsum (PG). Generally, this waste is discharged without any treatment, and it causes considerable environmental problems. Hence, the objective of this study is the treatment of phosphate waste using thermal plasma technology. First, the waste is characterized using different techniques, such as X-ray fluorescence (XRF), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and inductively coupled plasma (ICP). Such characterization shows that the waste contains different toxic elements, such as heavy metals, fluorine, chlorine, sulfur, and phosphorus. For this reason, a plasma reactor is used to separate toxic elements from metals, such as silicon, aluminum, and magnesium, with a pyrolysis/combustion plasma system. In this work, the influence of different parameters, such as time of treatment and plasma current, on the volatility of toxic elements is studied. The obtained results show that after 40 min of treatment and at a plasma current of 160 A, the phosphogypsum completely melts, and the most toxic elements, namely Pb, Cd, V, Cr, and As, are completely vaporized.

scholarly journals Multi-nanolayer drug delivery using radio frequency plasma technology

2020 ◽  
Author(s):  
AL-DYBIAT Iman ◽  
BAITUKHA Alibi ◽  
PIMPIE Cynthia ◽  
KACI Rachid ◽  
POCARD Marc ◽  
...  
Keyword(s):  
Drug Delivery ◽  
Cancer Cell ◽  
Anticancer Drug ◽  
Inductively Coupled Plasma ◽  
Collagen Membrane ◽  
Plasma Technology ◽  
Inductively Coupled ◽  
Anticancer Drug Delivery

Abstract Background: It may be impossible to perform cancer surgery with free margins in the presence of an unresectable structure. Local drug treatment after surgery has been proposed to increase the rate of tumor control. Methods: Multi-nanolayers (10-330nm) were generated by a low-pressure (375mTorr) inductively coupled plasma (13.56MHz) reactor for anticancer drug delivery by the deposition of polycaprolactone-polyethylene glycol multistack barrier on the collagen membrane (100µm thickness). Carboplatin (300µg/cm 2 ) was used for the in vitro and in vivo investigations. Energy-dispersive X-ray spectroscopy (15keV), scanning electron microscopy and inductively coupled plasma mass spectrometry were used to detect the presence of carboplatin in the nanolayer, the tumor sample and the culture medium. Preclinical studies were performed on ovarian (OVCAR-3NIH) and colon (CT26) cancer cell lines as xenografts (45 days) and allografts (23 days) in Swiss-nude (n=6) and immunocompetent BALB/cByJ mice (n=24), respectively. Results: The loading of carboplatin or other drugs between the nanofilm on the collagen membrane did not modify the mesh complex architecture or the drug properties. Drugs were detectable on the membrane for more than two weeks in the in vitro analysis and more than 10 days in the in vivo analysis. Cytotoxic mesh decreased cell adherence (down 5.42-fold) and induced cancer cell destruction (up to 7.87-fold). Implantation of the mesh on the mouse tumor nodule modified the cell architecture and decreased the tumor size (50.26%) compared to the control by inducing cell apoptosis. Conclusion: Plasma technology allows a mesh to be built with multi-nanolayer anticancer drug delivery on collagen membranes.

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