Optimized glass-ceramic substrate materials for EUVL applications

2004 ◽  
Author(s):  
Ina Mitra ◽  
Jochen Alkemper ◽  
Rolf Mueller ◽  
Uwe Nolte ◽  
Axel Engel ◽  
...  
Keyword(s):  
Glass Ceramic ◽  
Ceramic Substrate ◽  
Glass Ceramic Substrate

Large scale multilayer glass-ceramic substrate for supercomputer

1990 ◽  
Vol 13 (4) ◽  
pp. 751-758 ◽  
Author(s):  
Y. Shimada ◽  
Y. Kobayashi ◽  
K. Kata ◽  
M. Kurano ◽  
H. Takamizawa
Keyword(s):  
Glass Ceramic ◽  
Large Scale ◽  
Ceramic Substrate ◽  
Glass Ceramic Substrate

Low Firing Temperature Multilayer Glass-Ceramic Substrate

1983 ◽  
Vol 6 (4) ◽  
pp. 382-388 ◽  
Author(s):  
Y. Shimada ◽  
K. Utsumi ◽  
M. Suzuki ◽  
H. Takamizawa ◽  
M. Nitta ◽  
...  
Keyword(s):  
Firing Temperature ◽  
Glass Ceramic ◽  
Ceramic Substrate ◽  
Glass Ceramic Substrate

Large scale multilayer glass-ceramic substrate for supercomputer

2002 ◽  
Author(s):  
Y. Shimada ◽  
Y. Kobayashi ◽  
K. Kata ◽  
M. Kurano ◽  
H. Takamizawa
Keyword(s):  
Glass Ceramic ◽  
Large Scale ◽  
Ceramic Substrate ◽  
Glass Ceramic Substrate

Sol-Gel derived PbTiO3 films on a polar glass ceramic substrate

1994 ◽  
Vol 4 (1) ◽  
pp. 45-51 ◽  
Author(s):  
P. L. Zhang ◽  
W. L. Zhong ◽  
S. L. Wang ◽  
Y. G. Wang ◽  
Z. Y. Ding
Keyword(s):  
Glass Ceramic ◽  
Sol Gel ◽  
Ceramic Substrate ◽  
Glass Ceramic Substrate
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