High-efficiency microstructuring of VUV window materials by laser-induced plasma-assisted ablation (LIPAA) with a KrF excimer laser

2004 ◽  
Author(s):  
Houssam Jaber ◽  
Alexander Binder ◽  
David Ashkenasi
Keyword(s):  
Excimer Laser ◽  
High Efficiency ◽  
Laser Induced Plasma ◽  
Krf Excimer Laser

Expansion velocities of 0.5 ps KrF excimer laser induced plasma by Doppler-shift analysis of pump and probe measurements

2004 ◽  
Vol 79 (4-6) ◽  
pp. 1287-1290 ◽  
Author(s):  
Z. Tóth ◽  
B. Hopp ◽  
J. Klebniczki ◽  
N. Kresz ◽  
Z. Bor ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Doppler Shift ◽  
Laser Induced Plasma ◽  
Shift Analysis ◽  
Pump And Probe ◽  
Krf Excimer Laser ◽  
Probe Measurements

scholarly journals Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 nm KrF Excimer Laser

2019 ◽  
Vol 9 (24) ◽  
pp. 5320 ◽  
Author(s):  
Yu Zhao ◽  
Qian Li ◽  
Zhengfei Wang ◽  
Ziruo Dai ◽  
Tao Chen
Keyword(s):  
Excimer Laser ◽  
Quartz Substrate ◽  
Direct Interaction ◽  
Absorption Enhancement ◽  
Bottom Surface ◽  
Metal Target ◽  
Laser Induced Plasma ◽  
Plasma Ablation ◽  
Fused Quartz ◽  
Krf Excimer Laser

Laser-induced plasma ablation (LIPA) using a 248 nm KrF excimer laser was investigated for microchannel fabrication. Examination of the morphology in relation to ablation performance was emphasized, and a synthetic LIPA mechanism model was proposed based on the results. Backside LIPA with a metal target on the bottom can be attributed to a combination of two phenomena: laser-induced plasma vaporization thermal ablation from the metal target below and enhanced laser–glass direct interaction from the plasma residuum. The laser absorption enhancement of quartz substrate resulting from the metal residuum was validated clearly using absorption spectrum measurements. The influence of laser parameters on the etching quality during LIPA was also analyzed for processing optimization. Finally, fused quartz glass microchannels of outstanding surface quality and dimension uniformity were implemented. The channel depth was 28 μm, and the bottom surface roughness was better than several hundred nanometers.

A Discharge-Pumped KrF Excimer Laser with High Efficiency

2011 ◽  
Vol 38 (1) ◽  
pp. 0102001 ◽  
Author(s):  
王效顺 Wang Xiaoshun ◽  
余吟山 Yu Yinshan ◽  
王庆胜 Wang Qingsheng ◽  
梁勖 Liang Xu ◽  
游利兵 You Libing ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

High-efficiency electron-beam-excited KrF excimer laser

1983 ◽  
Vol 13 (10) ◽  
pp. 1364-1367 ◽  
Author(s):  
V M Buchnev ◽  
A D Klementov ◽  
P B Sergeev
Keyword(s):  
Electron Beam ◽  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

High‐efficiency KrF excimer laser

1976 ◽  
Vol 28 (1) ◽  
pp. 23-24 ◽  
Author(s):  
M. L. Bhaumik ◽  
R. S. Bradford ◽  
E. R. Ault
Keyword(s):  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled
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