Experimental and theoretical investigation of the early stage of laser induced plasma produced by the interaction between a KrF excimer laser and a metallic titanium target.

2002 ◽  
Author(s):  
Alessandro De Giacomo ◽  
G. Colonna ◽  
A. Casavola ◽  
O. De Pascale
Keyword(s):  
Excimer Laser ◽  
Theoretical Investigation ◽  
Early Stage ◽  
Metallic Titanium ◽  
Laser Induced Plasma ◽  
Titanium Target ◽  
Krf Excimer Laser

Expansion velocities of 0.5 ps KrF excimer laser induced plasma by Doppler-shift analysis of pump and probe measurements

2004 ◽  
Vol 79 (4-6) ◽  
pp. 1287-1290 ◽  
Author(s):  
Z. Tóth ◽  
B. Hopp ◽  
J. Klebniczki ◽  
N. Kresz ◽  
Z. Bor ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Doppler Shift ◽  
Laser Induced Plasma ◽  
Shift Analysis ◽  
Pump And Probe ◽  
Krf Excimer Laser ◽  
Probe Measurements

scholarly journals Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 nm KrF Excimer Laser

2019 ◽  
Vol 9 (24) ◽  
pp. 5320 ◽  
Author(s):  
Yu Zhao ◽  
Qian Li ◽  
Zhengfei Wang ◽  
Ziruo Dai ◽  
Tao Chen
Keyword(s):  
Excimer Laser ◽  
Quartz Substrate ◽  
Direct Interaction ◽  
Absorption Enhancement ◽  
Bottom Surface ◽  
Metal Target ◽  
Laser Induced Plasma ◽  
Plasma Ablation ◽  
Fused Quartz ◽  
Krf Excimer Laser

Laser-induced plasma ablation (LIPA) using a 248 nm KrF excimer laser was investigated for microchannel fabrication. Examination of the morphology in relation to ablation performance was emphasized, and a synthetic LIPA mechanism model was proposed based on the results. Backside LIPA with a metal target on the bottom can be attributed to a combination of two phenomena: laser-induced plasma vaporization thermal ablation from the metal target below and enhanced laser–glass direct interaction from the plasma residuum. The laser absorption enhancement of quartz substrate resulting from the metal residuum was validated clearly using absorption spectrum measurements. The influence of laser parameters on the etching quality during LIPA was also analyzed for processing optimization. Finally, fused quartz glass microchannels of outstanding surface quality and dimension uniformity were implemented. The channel depth was 28 μm, and the bottom surface roughness was better than several hundred nanometers.

Experimental and theoretical investigation of laser-induced plasma of a titanium target

2003 ◽  
Vol 42 (30) ◽  
pp. 5963 ◽  
Author(s):  
Anna Rita Casavola ◽  
Gianpiero Colonna ◽  
Alessandro De Giacomo ◽  
Olga De Pascale ◽  
Mario Capitelli
Keyword(s):  
Theoretical Investigation ◽  
Laser Induced Plasma ◽  
Titanium Target

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser
Sign in / Sign up

Export Citation Format

Share Document