High‐efficiency KrF excimer laser

1976 ◽  
Vol 28 (1) ◽  
pp. 23-24 ◽  
Author(s):  
M. L. Bhaumik ◽  
R. S. Bradford ◽  
E. R. Ault
Keyword(s):  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

A Discharge-Pumped KrF Excimer Laser with High Efficiency

2011 ◽  
Vol 38 (1) ◽  
pp. 0102001 ◽  
Author(s):  
王效顺 Wang Xiaoshun ◽  
余吟山 Yu Yinshan ◽  
王庆胜 Wang Qingsheng ◽  
梁勖 Liang Xu ◽  
游利兵 You Libing ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

High-efficiency electron-beam-excited KrF excimer laser

1983 ◽  
Vol 13 (10) ◽  
pp. 1364-1367 ◽  
Author(s):  
V M Buchnev ◽  
A D Klementov ◽  
P B Sergeev
Keyword(s):  
Electron Beam ◽  
Excimer Laser ◽  
High Efficiency ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser
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