Low-cost small-pixel uncooled infrared detector for large focal plane arrays using a standard CMOS process

2002 ◽  
Author(s):  
Selim Eminoglu ◽  
M. Yusuf Tanrikulu ◽  
Deniz S. Tezcan ◽  
Tayfun Akin
Keyword(s):  
Focal Plane ◽  
Low Cost ◽  
Infrared Detector ◽  
Focal Plane Arrays ◽  
Cmos Process ◽  
Standard Cmos Process ◽  
Small Pixel

scholarly journals Low-Cost Microbolometer Type Infrared Detectors

Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 800
Author(s):  
Le Yu ◽  
Yaozu Guo ◽  
Haoyu Zhu ◽  
Mingcheng Luo ◽  
Ping Han ◽  
...  
Keyword(s):  
Integrated Circuit ◽  
Focal Plane ◽  
Technological Development ◽  
Low Cost ◽  
Complementary Metal Oxide Semiconductor ◽  
Micro Electro Mechanical System ◽  
Focal Plane Arrays ◽  
Oxide Semiconductor ◽  
Cmos Process ◽  
Cmos Compatible

The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMOS process and simple post-CMOS micro-electro-mechanical system (MEMS) process. With the technological development, the performance of the commercialized CMOS-compatible microbolometers shows only a small gap with that of the mainstream ones. This paper reviews the basics and recent advances of the CMOS-compatible microbolometer IRFPAs in the aspects of the pixel structure, the read-out integrated circuit (ROIC), the focal plane array, and the vacuum packaging.

A low-cost infrared absorbing structure for an uncooled infrared detector in a standard CMOS process

2014 ◽  
Vol 35 (3) ◽  
pp. 034014 ◽  
Author(s):  
Ning Shen ◽  
Zhen'an Tang ◽  
Jun Yu ◽  
Zhengxing Huang
Keyword(s):  
Low Cost ◽  
Infrared Detector ◽  
Cmos Process ◽  
Standard Cmos Process

Further Developments in Improved Sensitivity, Low-cost Uncooled IR Detector Focal Plane Arrays

2010 ◽  
Author(s):  
Wendy L. Sarney ◽  
John W. Little ◽  
Kimberley A. Olver ◽  
Frank E. Livingston ◽  
Krisztian Niesz ◽  
...  
Keyword(s):  
Focal Plane ◽  
Low Cost ◽  
Focal Plane Arrays ◽  
Ir Detector

Small pixel oversampled IR focal plane arrays

2015 ◽  
Author(s):  
John Caulfield ◽  
Jon Curzan ◽  
Jay Lewis ◽  
Nibir Dhar
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Small Pixel
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