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1997 ◽  
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Hector Medecki ◽  
David T. Attwood, Jr. ◽  
...  
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Electrical Dimension Characterization of Binary and Alternating Aperture Phase-Shifting Masks

2002 ◽  
Author(s):  
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Stewart Smith ◽  
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Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

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2007 ◽  
Vol 134 (1) ◽  
pp. 221-230 ◽  
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