Using scanning probe microscopy and nanomoter surface profiler of DEKTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)

2001 ◽  
Author(s):  
Mojtaba Joodaki ◽  
Teoman Senyildiz ◽  
Guenter Kompa ◽  
Rainer Kassing ◽  
Hartmut Hillmer
Keyword(s):  
Thermal Stress ◽  
Scanning Probe Microscopy ◽  
Monolithic Integration ◽  
Scanning Probe ◽  
Integration Technology ◽  
Probe Microscopy

scholarly journals Direct determination of the effect of strain on domain morphology in ferroelectric superlattices with scanning probe microscopy

2012 ◽  
Vol 112 (5) ◽  
pp. 052011 ◽  
Author(s):  
K. Kathan-Galipeau ◽  
P. P. Wu ◽  
Y. L. Li ◽  
L. Q. Chen ◽  
A. Soukiassian ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Direct Determination ◽  
Scanning Probe ◽  
Probe Microscopy
Sign in / Sign up

Export Citation Format

Share Document