Mechanism studies of scanning electron microscope measurement effects on 193-nm photoresists and the development of improved line-width measurement methods

2001 ◽  
Author(s):  
T. R. Sarrubi ◽  
Matthew F. Ross ◽  
Mark Neisser ◽  
Thomas Kocab ◽  
Bernard T. Beauchemin, Jr. ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Line Width ◽  
Measurement Methods ◽  
Scanning Electron Microscope Measurement ◽  
Width Measurement ◽  
193 Nm ◽  
Measurement Effects ◽  
Scanning Electron

The image of a line width test object in a scanning electron microscope with different energies of the probe electrons

2009 ◽  
Vol 52 (7) ◽  
pp. 713-718 ◽  
Author(s):  
Ch. P. Volk ◽  
V. B. Mityukhlyaev ◽  
Yu. A. Novikov ◽  
A. V. Rakov ◽  
P. A. Todua
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Line Width ◽  
Test Object ◽  
Scanning Electron

scholarly journals Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

2015 ◽  
Vol 154 ◽  
pp. 15-28 ◽  
Author(s):  
J.S. Villarrubia ◽  
A.E. Vladár ◽  
B. Ming ◽  
R.J. Kline ◽  
D.F. Sunday ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Electron Microscope Measurement ◽  
Scanning Electron

The Alteration of the Pore Spaces in Sandstones

1973 ◽  
Vol 31 ◽  
pp. 210-211
Author(s):  
R. E. Ferrell ◽  
G. G. Paulson
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
The Other ◽  
Coarse Grained ◽  
Depositional Fabric ◽  
Soluble Components ◽  
Scanning Electron ◽  
Shape And Size

The pore spaces in sandstones are the result of the original depositional fabric and the degree of post-depositional alteration that the rock has experienced. The largest pore volumes are present in coarse-grained, well-sorted materials with high sphericity. The chief mechanisms which alter the shape and size of the pores are precipitation of cementing agents and the dissolution of soluble components. Each process may operate alone or in combination with the other, or there may be several generations of cementation and solution.The scanning electron microscope has ‘been used in this study to reveal the morphology of the pore spaces in a variety of moderate porosity, orthoquartzites.

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