Scanning-electron-microscope image processing for accurate analysis of line-edge and line-width roughness

2012 ◽  
Author(s):  
Atsushi Hiraiwa ◽  
Akio Nishida
Keyword(s):  
Image Processing ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Line Width ◽  
Scanning Electron Microscope Image ◽  
Accurate Analysis ◽  
Microscope Image ◽  
Electron Microscope Image ◽  
Scanning Electron

Simulation of Scanning Electron Microscope Image for Trench Structures

1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6281-6286 ◽  
Author(s):  
Masatoshi Kotera ◽  
Satoru Yamaguchi ◽  
Sachio Umegaki ◽  
Hiroshi Suga
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Electron Microscope Image ◽  
Microscope Image ◽  
Electron Microscope Image ◽  
Scanning Electron
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