Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

2001 ◽  
Author(s):  
Ulrich Vogt ◽  
Holger Stiel ◽  
Ingo Will ◽  
Marek Wieland ◽  
Thomas Wilhein ◽  
...  
Keyword(s):  
Liquid Water ◽  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Average Power ◽  
Plasma Source ◽  
Scaling Up ◽  
Water Jet ◽  
Extreme Ultraviolet Lithography ◽  
High Average Power ◽  
Ultraviolet Lithography

Dynamics of Mass-Limited Laser Plasma Targets as Sources for Extreme Ultraviolet Lithography

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4070-4073 ◽  
Author(s):  
Christian Keyser ◽  
Robert Bernath ◽  
Moza Al-Rabban ◽  
Martin Richardson
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography
Sign in / Sign up

Export Citation Format

Share Document