Precise angle measurement technique for a vertical microstructure on substrate

2001 ◽  
Author(s):  
Hoseong Kim ◽  
Jinhwan Ko
Keyword(s):  
Measurement Technique ◽  
Angle Measurement

Reproducibility of a simplified Q-angle measurement technique

2010 ◽  
Vol 21 (2) ◽  
pp. 158-164 ◽  
Author(s):  
Jason D. Peeler ◽  
Jeff Leiter ◽  
Judy E. Anderson
Keyword(s):  
Measurement Technique ◽  
Angle Measurement ◽  
Q Angle

An evaluation of a new side-wall-angle measurement technique for mask patterns by CD-SEM

2009 ◽  
Author(s):  
Hidemitsu Hakii ◽  
Isao Yonekura ◽  
Masashi Kawashita ◽  
Yosuke Kojima ◽  
Yoshifumi Sakamoto ◽  
...  
Keyword(s):  
Measurement Technique ◽  
Side Wall ◽  
Angle Measurement ◽  
Wall Angle

Optical alignment and tilt-angle measurement technique based on Lloyd’s mirror arrangement

1992 ◽  
Vol 17 (14) ◽  
pp. 1024 ◽  
Author(s):  
Huihua Kenny Chiang ◽  
Richard P. Kenan ◽  
Nile F. Hartman ◽  
Christopher J. Summers
Keyword(s):  
Measurement Technique ◽  
Tilt Angle ◽  
Angle Measurement ◽  
Optical Alignment

scholarly journals Research on divergence angle measurement technique of terahertz sources

2021 ◽  
Vol 42 (3) ◽  
pp. 499-503
Author(s):  
YU Bing ◽  
◽  
◽  
WANG Baolong ◽  
LI Hongguang ◽  
...  
Keyword(s):  
Measurement Technique ◽  
Angle Measurement ◽  
Divergence Angle ◽  
Terahertz Sources

Study on One Measurement Method of Earth Angle

2012 ◽  
Vol 571 ◽  
pp. 622-625
Author(s):  
Fu Bao Li ◽  
Zhong Ke Li ◽  
Qin Li ◽  
De Xi Wang
Keyword(s):  
Chemical Reaction ◽  
Measurement Technique ◽  
Measurement Method ◽  
Rational Design ◽  
Road Construction ◽  
High Accuracy ◽  
Angle Measurement ◽  
Ac Drive ◽  
The Earth ◽  
Long Time

Earth angle measurement technique has important applications in civil construction, equipment installation, road construction and other fields. This article uses AC drive liquid pendulum to avoid the failure under the chemical reaction effect of electrolyte for a long time in DC. At the same time, using two sensors placed perpendicular to each other can simultaneously measure east and west angle of the two directions of the earth. The rational design of circuit makes it small in size with high accuracy.

Research of Angle Measurement Technique in Transponder Landing System

2012 ◽  
Vol 7 (6) ◽  
Author(s):  
Yihuan Yang ◽  
Xiubin Zhao ◽  
Jian’an Zhang
Keyword(s):  
Measurement Technique ◽  
Angle Measurement
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