Realization of mass production for 130-nm node and future applicatiton for high transmission using ZrSi-based attenuated phase-shift mask in ArF lithography

2001 ◽  
Author(s):  
Toshihiro Ii ◽  
Tadashi Saga ◽  
Yusuke Hattori ◽  
Takashi Ohshima ◽  
Masao Otaki ◽  
...  
Keyword(s):  
Phase Shift ◽  
Mass Production ◽  
High Transmission ◽  
Phase Shift Mask

Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask: II. Experimental results

1999 ◽  
Author(s):  
Robert J. Socha ◽  
Xuelong Shi ◽  
Ken C. Holman ◽  
Mircea V. Dusa ◽  
Will Conley ◽  
...  
Keyword(s):  
Phase Shift ◽  
Experimental Results ◽  
High Transmission ◽  
Phase Shift Mask

Imaging behavior of high-transmission attenuating phase-shift mask films

2006 ◽  
Author(s):  
Michael Hibbs ◽  
Satoru Nemoto ◽  
Toru Komizo
Keyword(s):  
Phase Shift ◽  
High Transmission ◽  
Phase Shift Mask

Development of a new high transmission phase shift mask technology for 10 nm logic node

2016 ◽  
Author(s):  
Thomas Faure ◽  
Yoshifumi Sakamoto ◽  
Yusuke Toda ◽  
Karen Badger ◽  
Kazunori Seki ◽  
...  
Keyword(s):  
Phase Shift ◽  
High Transmission ◽  
Phase Shift Mask ◽  
Transmission Phase

Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask through simulation I

1998 ◽  
Author(s):  
Robert J. Socha ◽  
John S. Petersen ◽  
J. Fung Chen ◽  
Thomas L. Laidig ◽  
Kurt E. Wampler ◽  
...  
Keyword(s):  
Phase Shift ◽  
High Transmission ◽  
Phase Shift Mask

Realization of practical attenuated phase-shift mask with high-transmission KrF excimer laser exposure

1999 ◽  
Author(s):  
Nobuhito Toyama ◽  
Hiroyuki Miyashita ◽  
Yasutaka Morikawa ◽  
Hiroshi Fujita ◽  
Kazuya Iwase ◽  
...  
Keyword(s):  
Phase Shift ◽  
Excimer Laser ◽  
Laser Exposure ◽  
High Transmission ◽  
Krf Excimer Laser ◽  
Phase Shift Mask

Highly reliable detection and correction of pinched areas for high transmission phase shift mask

2008 ◽  
Author(s):  
Chih Li Chen ◽  
Chun-Cheng Liao ◽  
Pin-Jan Chou ◽  
Chiang Lin Shih ◽  
Steven Shih
Keyword(s):  
Phase Shift ◽  
High Transmission ◽  
Reliable Detection ◽  
Phase Shift Mask ◽  
Transmission Phase

A novel "high-transmission" phase shift mask for ArF lithographic performance enhancement

2020 ◽  
Author(s):  
Naoto Yonemaru ◽  
Kazuaki Matsui ◽  
Yosuke Kojima ◽  
Tatsuya Nagatomo ◽  
Mitsuharu Yamana
Keyword(s):  
Phase Shift ◽  
Performance Enhancement ◽  
High Transmission ◽  
Phase Shift Mask ◽  
Transmission Phase

High-transmission attenuated phase-shift mask for ArF immersion lithography

2006 ◽  
Author(s):  
Yosuke Kojima ◽  
Takashi Mizoguchi ◽  
Takashi Haraguchi ◽  
Toshio Konishi ◽  
Yoshimitsu Okuda
Keyword(s):  
Phase Shift ◽  
Immersion Lithography ◽  
High Transmission ◽  
Phase Shift Mask
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