Xenon liquid-jet laser plasma source for EUV lithography

2000 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
Euv Lithography

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Improved liquid jet laser-plasma source for X-ray microscopy

2003 ◽  
Vol 104 ◽  
pp. 121-122
Author(s):  
J. de Groot ◽  
G. A. Johansson ◽  
O. Hemberg ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
X Ray

Liquid-xenon-jet laser-plasma source for EUV lithography

2001 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Target optimization of a water-window liquid-jet laser–plasma source

2003 ◽  
Vol 94 (6) ◽  
pp. 3717-3721 ◽  
Author(s):  
J. de Groot ◽  
O. Hemberg ◽  
A. Holmberg ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
Water Window

Laser and optical developments of a modular laser-plasma source for EUV lithography

2005 ◽  
Author(s):  
G. Cheymol ◽  
Ph. Cormont ◽  
D. Farcage ◽  
A. Montmerle-Bonnefois ◽  
P.-Y. Thro ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Euv Lithography

Laser plasma source for soft x-ray imaging in CIOM

1997 ◽  
Author(s):  
Zhongxing Shao ◽  
Zhanshan Wang ◽  
Fengming Xu ◽  
Junxia Lu ◽  
Xingdan Chen
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
X Ray Imaging

Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications

1988 ◽  
Author(s):  
I C. E. Turcu ◽  
F O'Neill ◽  
U Zammit ◽  
Y Al-Hadithi ◽  
R W. Eason ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

X-ray and EUV laser-plasma sources based on cryogenic liquid-jet target

1999 ◽  
Author(s):  
Lars Rymell ◽  
Magnus Berglund ◽  
Bjoern A. M. Hansson ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Cryogenic Liquid ◽  
Liquid Jet ◽  
Plasma Sources ◽  
X Ray
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