X-ray and EUV laser-plasma sources based on cryogenic liquid-jet target

1999 ◽  
Author(s):  
Lars Rymell ◽  
Magnus Berglund ◽  
Bjoern A. M. Hansson ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Cryogenic Liquid ◽  
Liquid Jet ◽  
Plasma Sources ◽  
X Ray

Liquid-jet target laser-plasma sources for EUV and X-ray lithography

1999 ◽  
Vol 46 (1-4) ◽  
pp. 453-455 ◽  
Author(s):  
L. Rymell ◽  
L. Malmqvist ◽  
M. Berglund ◽  
H.M. Hertz
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
Plasma Sources ◽  
X Ray

Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

1998 ◽  
Vol 69 (6) ◽  
pp. 2361-2364 ◽  
Author(s):  
M. Berglund ◽  
L. Rymell ◽  
H. M. Hertz ◽  
T. Wilhein
Keyword(s):  
Laser Plasma ◽  
Cryogenic Liquid ◽  
Liquid Jet ◽  
X Ray

scholarly journals Nanoimaging using soft X-ray and EUV laser-plasma sources

2018 ◽  
Vol 167 ◽  
pp. 03001 ◽  
Author(s):  
Przemyslaw Wachulak ◽  
Alfio Torrisi ◽  
Mesfin Ayele ◽  
Andrzej Bartnik ◽  
Joanna Czwartos ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Material Science ◽  
Imaging Systems ◽  
Fibroblast Cells ◽  
Plasma Sources ◽  
Full Field ◽  
X Ray ◽  
Water Window ◽  
Imaging Results ◽  
New Research

In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the “water-window” spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Improved liquid jet laser-plasma source for X-ray microscopy

2003 ◽  
Vol 104 ◽  
pp. 121-122
Author(s):  
J. de Groot ◽  
G. A. Johansson ◽  
O. Hemberg ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
X Ray

Liquid-target laser-plasma sources for EUV and x-ray lithography

1999 ◽  
Author(s):  
Hans M. Hertz ◽  
Magnus Berglund ◽  
Bjoern A. M. Hansson ◽  
Lars Rymell
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray

Laser Plasma Sources for Scanning X-Ray Microscopy

1986 ◽  
Author(s):  
A. G. Michette ◽  
C.P. B. Hills ◽  
A. M. Rogoyski ◽  
P. Charalambous
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray

Liquid-jet laser-plasma X-ray sources for microscopy and lithography

2001 ◽  
Vol 11 (PR2) ◽  
pp. Pr2-389-Pr2-396 ◽  
Author(s):  
H. M. Hertz ◽  
M. Berglund ◽  
B. A.M. Hansson ◽  
O. Hemberg ◽  
G. J. Johansson
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
X Ray

Soft X-ray contact microscopy using laser plasma sources

1986 ◽  
Vol 19 (3) ◽  
pp. 363-372 ◽  
Author(s):  
A G Michette ◽  
P C Cheng ◽  
R W Easons ◽  
R Feder ◽  
F O'Neill ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray
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