Laser and optical developments of a modular laser-plasma source for EUV lithography

2005 ◽  
Author(s):  
G. Cheymol ◽  
Ph. Cormont ◽  
D. Farcage ◽  
A. Montmerle-Bonnefois ◽  
P.-Y. Thro ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Euv Lithography

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Xenon liquid-jet laser plasma source for EUV lithography

2000 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
Euv Lithography

Liquid-xenon-jet laser-plasma source for EUV lithography

2001 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Laser plasma source for soft x-ray imaging in CIOM

1997 ◽  
Author(s):  
Zhongxing Shao ◽  
Zhanshan Wang ◽  
Fengming Xu ◽  
Junxia Lu ◽  
Xingdan Chen
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
X Ray Imaging

Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications

1988 ◽  
Author(s):  
I C. E. Turcu ◽  
F O'Neill ◽  
U Zammit ◽  
Y Al-Hadithi ◽  
R W. Eason ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

XUV laser-plasma source based on solid Ar filament

2007 ◽  
Vol 78 (10) ◽  
pp. 103509 ◽  
Author(s):  
Christian Peth ◽  
Anton Kalinin ◽  
Frank Barkusky ◽  
Klaus Mann ◽  
J. Peter Toennies ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source

Low-Energy Plasma Source for Clean Vacuum Environments: EUV Lithography and Optical Mirrors Cleaning

2021 ◽  
pp. 1-10
Author(s):  
Jacqueline van Veldhoven ◽  
Aneta S. Stodolna ◽  
Arnold Storm ◽  
Jeroen van Brink den ◽  
Niels Geerits ◽  
...  
Keyword(s):  
Plasma Source ◽  
Low Energy ◽  
Euv Lithography ◽  
Optical Mirrors
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