High-repetition-rate ultranarrow-bandwidth 193-nm excimer lasers for DUV lithography

2000 ◽  
Author(s):  
Uwe Stamm ◽  
Rainer Paetzel ◽  
Igor Bragin ◽  
Juergen Kleinschmidt ◽  
Peter Lokai ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition ◽  
193 Nm

High-repetition-rate excimer lasers for 193-nm lithography

2002 ◽  
Author(s):  
Wolfgang Zschocke ◽  
Hans Stephen Albrecht ◽  
Thomas Schroeder ◽  
Igor Bragin ◽  
Peter Lokai ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition ◽  
193 Nm

High Repetition Rate High Power Excimer Lasers

1989 ◽  
Author(s):  
Hubertus M. von Bergmann ◽  
Gordon L. Bredenkamp ◽  
Piet H. Swart
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

Prospects for high-power high-repetition-rate industrial excimer lasers

2001 ◽  
Author(s):  
Vladimir M. Borisov ◽  
Oleg B. Khristoforov ◽  
Yurii B. Kirykhin ◽  
Aleksandr Y. Vinokhodov ◽  
Andrei I. Demin ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

High-repetition-rate excimer lasers for DUV lithography

1999 ◽  
Author(s):  
Uwe Stamm ◽  
Rainer Paetzel ◽  
Igor Bragin ◽  
Vincent Berger ◽  
Ingo Klaft ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

High-Repetition-Rate Applications of Excimer Lasers

2005 ◽  
pp. 385-397
Author(s):  
R. F. Delmdahl ◽  
L. Herbst ◽  
B. Nikolaus
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition
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