High efficiency operation of the high repetition rate magnetic pulse compressor for krf excimer lasers

2005 ◽  
Author(s):  
H. Hatanaka ◽  
M. Obara
Keyword(s):  
Repetition Rate ◽  
High Efficiency ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
Magnetic Pulse ◽  
Pulse Compressor ◽  
High Repetition ◽  
Magnetic Pulse Compressor

High Repetition Rate High Power Excimer Lasers

1989 ◽  
Author(s):  
Hubertus M. von Bergmann ◽  
Gordon L. Bredenkamp ◽  
Piet H. Swart
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

High-efficiency high-repetition-rate gain-switched operation around 3  μm in Cr2+:CdSe single-crystal laser pumped by fiber-laser-pumped Ho3+:YAG laser

2019 ◽  
Vol 44 (5) ◽  
pp. 1285 ◽  
Author(s):  
Oleg L. Antipov ◽  
Ilya D. Eranov ◽  
Mikhail P. Frolov ◽  
Yuri V. Korostelin ◽  
Vladimir I. Kozlovsky ◽  
...  
Keyword(s):  
Single Crystal ◽  
Fiber Laser ◽  
Repetition Rate ◽  
High Efficiency ◽  
High Repetition Rate ◽  
Yag Laser ◽  
High Repetition ◽  
Crystal Laser

Prospects for high-power high-repetition-rate industrial excimer lasers

2001 ◽  
Author(s):  
Vladimir M. Borisov ◽  
Oleg B. Khristoforov ◽  
Yurii B. Kirykhin ◽  
Aleksandr Y. Vinokhodov ◽  
Andrei I. Demin ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

High efficiency, high repetition rate, all-fiber picoseconds pulse MOPA source with 125 W output in 15 μm fiber core

2012 ◽  
Vol 109 (2) ◽  
pp. 233-238 ◽  
Author(s):  
H. W. Chen ◽  
Y. Lei ◽  
S. P. Chen ◽  
J. Hou ◽  
Q. S. Lu
Keyword(s):  
Repetition Rate ◽  
High Efficiency ◽  
High Repetition Rate ◽  
Fiber Core ◽  
High Repetition

High-repetition-rate excimer lasers for DUV lithography

1999 ◽  
Author(s):  
Uwe Stamm ◽  
Rainer Paetzel ◽  
Igor Bragin ◽  
Vincent Berger ◽  
Ingo Klaft ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition
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