High Repetition Rate High Power Excimer Lasers

1989 ◽  
Author(s):  
Hubertus M. von Bergmann ◽  
Gordon L. Bredenkamp ◽  
Piet H. Swart
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

Prospects for high-power high-repetition-rate industrial excimer lasers

2001 ◽  
Author(s):  
Vladimir M. Borisov ◽  
Oleg B. Khristoforov ◽  
Yurii B. Kirykhin ◽  
Aleksandr Y. Vinokhodov ◽  
Andrei I. Demin ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Excimer Lasers ◽  
High Repetition

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser
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