193-nm positive-tone bilayer resist based on norbornene-maleic anhydride copolymers

2000 ◽  
Author(s):  
Ratnam Sooriyakumaran ◽  
Debra Fenzel-Alexander ◽  
Phillip J. Brock ◽  
Carl E. Larson ◽  
Richard A. Di Pietro ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers

Cycloolefin/maleic anhydride copolymers for 193-nm resist compositions

1999 ◽  
Author(s):  
M. D. Rahman ◽  
Ralph R. Dammel ◽  
Michelle M. Cook ◽  
Stanley A. Ficner ◽  
Munirathna Padmanaban ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers

Cycloolefin-maleic anhydride copolymers for 193-nm resist compositions

2000 ◽  
Author(s):  
M. D. Rahman ◽  
Jun-Bom Bae ◽  
Michelle M. Cook ◽  
Dana L. Durham ◽  
Takanori Kudo ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Maleic Anhydride Copolymers

Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists

Polymer ◽  
2000 ◽  
Vol 41 (22) ◽  
pp. 8035-8039 ◽  
Author(s):  
J.-B Kim ◽  
H.-J Yun ◽  
Y.-G Kwon ◽  
B.-W Lee
Keyword(s):  
Maleic Anhydride ◽  
193 Nm ◽  
Norbornene Derivatives

Synthesis of Cycloolefin−Maleic Anhydride Alternating Copolymers for 193 nm Imaging

1997 ◽  
Vol 30 (21) ◽  
pp. 6517-6524 ◽  
Author(s):  
F. M. Houlihan ◽  
T. I. Wallow ◽  
O. Nalamasu ◽  
E. Reichmanis
Keyword(s):  
Maleic Anhydride ◽  
Alternating Copolymers ◽  
193 Nm

Base additives for use in a single layer 193-nm resist based upon poly(norbornene/maleic anhydride/acrylic acid/ tert -butyl acrylate)

2001 ◽  
Author(s):  
Francis M. Houlihan ◽  
Donna Person ◽  
Omkaram Nalamasu ◽  
Ilya Rushkin ◽  
Ognian N. Dimov ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Acrylic Acid ◽  
Butyl Acrylate ◽  
Single Layer ◽  
Tert Butyl ◽  
193 Nm

Synergistic effect of asphaltenes and octadecyl acrylate-maleic anhydride copolymers modified by aromatic pendants on the flow behavior of model waxy oils

Fuel ◽  
2020 ◽  
Vol 260 ◽  
pp. 116381
Author(s):  
Xiaoping Zhang ◽  
Fei Yang ◽  
Bo Yao ◽  
Chuanxian Li ◽  
Daiwei Liu ◽  
...  
Keyword(s):  
Maleic Anhydride ◽  
Synergistic Effect ◽  
Flow Behavior ◽  
Maleic Anhydride Copolymers
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