Toward a high-average-power and debris-free soft x-ray source for microlithography pumped by a long-pulse excimer laser

1999 ◽  
Author(s):  
Sarah Bollanti ◽  
Paolo Di Lazzaro ◽  
Francesco Flora ◽  
Tommaso Letardi ◽  
Alessandro Marinai ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
High Average Power ◽  
X Ray ◽  
Pulse Excimer Laser ◽  
Long Pulse

scholarly journals Single-Grain Si TFTs Fabricated by Liquid-Si and Long-Pulse Excimer-Laser

2013 ◽  
Vol 50 (8) ◽  
pp. 49-53 ◽  
Author(s):  
R. Ishihara ◽  
J. Zhang ◽  
M. Trifunovic ◽  
M. van der Zwan ◽  
H. Takagishi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Pulse Excimer Laser ◽  
Single Grain ◽  
Long Pulse

Compact high-average-power laser-plasma x-ray source by cryogenic target

2001 ◽  
Author(s):  
Takayasu Mochizuki ◽  
Atsushi Shimoura ◽  
Sho Amano ◽  
Shuji Miyamoto
Keyword(s):  
Laser Plasma ◽  
Average Power ◽  
High Average Power ◽  
Power Laser ◽  
X Ray ◽  
Cryogenic Target

Enhanced Energy Transport via Quartz Fibers Using 250 ns Long-Pulse Excimer Laser

1988 ◽  
pp. 101-103
Author(s):  
U. Sowada ◽  
H.-J. Kahlert ◽  
W. Mückenheim ◽  
D. Basting
Keyword(s):  
Excimer Laser ◽  
Energy Transport ◽  
Pulse Excimer Laser ◽  
Long Pulse

Study of high-average-power excimer laser with circulation loop

1991 ◽  
Author(s):  
Bruno Godard ◽  
Emmanuel Estocq ◽  
Marc X. Stehle ◽  
Jean C. Bonnet ◽  
Daniel R. Pigache
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
Circulation Loop ◽  
High Average Power

Limitations of a high average power excimer laser by acoustic or shock waves

1990 ◽  
Author(s):  
M. Bessafi ◽  
P. Canarelli ◽  
B. L. Fontaine ◽  
B. M. Forestier ◽  
Ph. C. Delaporte ◽  
...  
Keyword(s):  
Shock Waves ◽  
Excimer Laser ◽  
Average Power ◽  
High Average Power

PHASE CONJUGATED LASERS APPLIED TO X-RAY GENERATION

1994 ◽  
Vol 03 (02) ◽  
pp. 137-167 ◽  
Author(s):  
L.A. HACKEL ◽  
C.B. DANE ◽  
L.E. ZAPATA ◽  
M.R. HERMANN
Keyword(s):  
Pulse Repetition Frequency ◽  
Average Power ◽  
Experimental Investigations ◽  
High Average Power ◽  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Laser Systems ◽  
Frequency Laser ◽  
Ray Projection

Three laser systems that are being developed for use in X-ray generation which incorporate SBS phase conjugate mirrors are described. A 25 J/pulse Nd:glass laser is being developed for commercial proximity print X-ray lithography; a 0.5 J/pulse, 1.3 kHz pulse repetition frequency laser is being built for soft X-ray projection lithography; and a 1 kJ/pulse laser driver for a table top X-ray laser has been designed. The results of prototypical experimental investigations are presented and the basic design principles for high average power phase conjugated laser systems shared by each of these lasers are discussed.

Development of a 33 kV, 20 A long pulse converter modulator for high average power klystron

2014 ◽  
Vol 85 (5) ◽  
pp. 055102 ◽  
Author(s):  
T. Reghu ◽  
V. Mandloi ◽  
Purushottam Shrivastava
Keyword(s):  
Average Power ◽  
High Average Power ◽  
Pulse Converter ◽  
Long Pulse
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