Small displacement measurements based on total-internal-reflection heterodyne interferometry

1999 ◽  
Author(s):  
Ming-Horng Chiu ◽  
Jiun-You Lin ◽  
Der-Chin Su
Keyword(s):  
Total Internal Reflection ◽  
Internal Reflection ◽  
Small Displacement ◽  
Heterodyne Interferometry ◽  
Displacement Measurements

Z-Axis Displacement Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry

2013 ◽  
Vol 746 ◽  
pp. 564-569
Author(s):  
Shinn Fwu Wang ◽  
Ting Huan Chen ◽  
Pei Cheng Ke ◽  
Yi Chu ◽  
Yu Pin Liao ◽  
...  
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Total Internal Reflection ◽  
High Sensitivity ◽  
Side Surface ◽  
Internal Reflection ◽  
Displacement Sensor ◽  
Small Displacement ◽  
Heterodyne Interferometry

In this paper, a z-axis displacement sensor based on Total-Internal Reflection and Surface Plasmon Resonance in heterodyne interferometry is proposed. The sensing unit is composed of a parallelogram prism, i.e. elongated prism, and a displacement probe. One side surface of the elongated prism was coated with a 2 nm Ti-film and a 45.5 nm Au-film, but the other side surface of that were not coated with metal films. The z-axis displacement sensor is with high sensitivity and resolution due to multiple attenuated total reflections and total internal reflections effects. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. In fact, the displacement resolution of the z-axis displacement meter can reach sub-nanometer by numerical simulation. The small-displacement sensor has some merits, e.g., in real-time test, easy operation, high measurement accuracy, high resolution, etc.

Superresolution confocal technology for displacement measurements based on total internal reflection

2010 ◽  
Vol 81 (10) ◽  
pp. 103702 ◽  
Author(s):  
Cuifang Kuang ◽  
M. Yakut Ali ◽  
Xiang Hao ◽  
Tingting Wang ◽  
Xu Liu
Keyword(s):  
Total Internal Reflection ◽  
Internal Reflection ◽  
Displacement Measurements

Application of Total Internal Reflection and Heterodyne Interferometry in Electrical Conductivity Measurements

2016 ◽  
Vol 16 (2) ◽  
pp. 336-342 ◽  
Author(s):  
Jyh-Shyan Chiu ◽  
Shinn-Fwu Wang ◽  
Wen-June Wang ◽  
Bo-Shun Huang ◽  
Wesley Lai ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Total Internal Reflection ◽  
Internal Reflection ◽  
Conductivity Measurements ◽  
Heterodyne Interferometry

scholarly journals Vacuum measurement using total-internal-reflection heterodyne interferometry

1999 ◽  
Vol 23 (4) ◽  
pp. 260-263 ◽  
Author(s):  
Ming-Horng Chiu ◽  
Ju-Yi Lee ◽  
Der-Chin Su ◽  
King-Hung Lee
Keyword(s):  
Total Internal Reflection ◽  
Internal Reflection ◽  
Heterodyne Interferometry ◽  
Vacuum Measurement

Measurement of small wavelength shifts based on total internal reflection heterodyne interferometry

2016 ◽  
Vol 14 (8) ◽  
pp. 081202-81205
Author(s):  
Meng-Chang Hsieh Meng-Chang Hsieh ◽  
Jiun-You Lin Jiun-You Lin ◽  
and Chia-Ou Chang and Chia-Ou Chang
Keyword(s):  
Total Internal Reflection ◽  
Internal Reflection ◽  
Heterodyne Interferometry
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