scholarly journals A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry

Sensors ◽  
2009 ◽  
Vol 9 (4) ◽  
pp. 2498-2510 ◽  
Author(s):  
Shinn-Fwu Wang
2013 ◽  
Vol 746 ◽  
pp. 564-569
Author(s):  
Shinn Fwu Wang ◽  
Ting Huan Chen ◽  
Pei Cheng Ke ◽  
Yi Chu ◽  
Yu Pin Liao ◽  
...  

In this paper, a z-axis displacement sensor based on Total-Internal Reflection and Surface Plasmon Resonance in heterodyne interferometry is proposed. The sensing unit is composed of a parallelogram prism, i.e. elongated prism, and a displacement probe. One side surface of the elongated prism was coated with a 2 nm Ti-film and a 45.5 nm Au-film, but the other side surface of that were not coated with metal films. The z-axis displacement sensor is with high sensitivity and resolution due to multiple attenuated total reflections and total internal reflections effects. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. In fact, the displacement resolution of the z-axis displacement meter can reach sub-nanometer by numerical simulation. The small-displacement sensor has some merits, e.g., in real-time test, easy operation, high measurement accuracy, high resolution, etc.


2013 ◽  
Vol 479-480 ◽  
pp. 682-686
Author(s):  
Shinn Fwu Wang ◽  
Chi Tun Chen ◽  
Fu Hsi Kao ◽  
Yi Chu ◽  
Shyh Rong Lay ◽  
...  

In this article, a small-displacement sensing system based on the surface plasmon resonance technology in heterodyne interferometry is proposed and evaluated. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.155nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.


2020 ◽  
pp. 44-49
Author(s):  
I. N. Pavlov

Two optical methods, namely surface plasmon resonance imaging and frustrated total internal reflection, are described in the paper in terms of comparing their sensitivity to change of refractive index of a thin boundary layer of an investigated medium. It is shown that, despite the fact that the theoretically calculated sensitivity is higher for the frustrated total internal reflection method, and the fact that usually in practice the surface plasmon resonance method, on the contrary, is considered more sensitive, under the same experimental conditions both methods show a similar result.


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