In-situ beam position monitoring system for electron-beam lithography

1999 ◽  
Author(s):  
Hitoshi Sunaoshi ◽  
Munehiro Ogasawara ◽  
Jun Takamatsu ◽  
Naoharu Shimomura
Keyword(s):  
Electron Beam ◽  
Monitoring System ◽  
Electron Beam Lithography ◽  
Beam Position ◽  
Position Monitoring

Beam position monitoring system upgrade for the TLS

2007 ◽  
Author(s):  
C. H. Kuo ◽  
P. C. Chiu ◽  
Jenny Chen ◽  
K.H. Hu ◽  
K. T. Hsu
Keyword(s):  
Monitoring System ◽  
Beam Position ◽  
Position Monitoring

scholarly journals Three-Dimensional in Situ Electron-Beam Lithography Using Water Ice

Nano Letters ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 5036-5041 ◽  
Author(s):  
Yu Hong ◽  
Ding Zhao ◽  
Dongli Liu ◽  
Binze Ma ◽  
Guangnan Yao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Three Dimensional ◽  
Water Ice

scholarly journals Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing

2015 ◽  
Vol 86 (7) ◽  
pp. 073903 ◽  
Author(s):  
Arsenty Kaganskiy ◽  
Manuel Gschrey ◽  
Alexander Schlehahn ◽  
Ronny Schmidt ◽  
Jan-Hindrik Schulze ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Device Processing ◽  
Nanophotonic Device

In situ patterning of organic molecules in aqueous solutions using an inverted electron-beam lithography system

2016 ◽  
Vol 55 (6S1) ◽  
pp. 06GL07 ◽  
Author(s):  
Hiroki Miyazako ◽  
Kazuhiko Ishihara ◽  
Kunihiko Mabuchi ◽  
Takayuki Hoshino
Keyword(s):  
Electron Beam ◽  
Aqueous Solutions ◽  
Electron Beam Lithography ◽  
Organic Molecules ◽  
Lithography System

Beam position monitoring system using PIN diode switches

2002 ◽  
Author(s):  
K. Shinoe ◽  
T. Koseki ◽  
Y. Kamiya ◽  
N. Nakamura ◽  
T. Katsura ◽  
...  
Keyword(s):  
Monitoring System ◽  
Pin Diode ◽  
Beam Position ◽  
Position Monitoring

Fabrication of quantum wires on GaAs substrates patterned by in situ electron-beam lithography

1996 ◽  
Vol 40 (1-8) ◽  
pp. 627-631 ◽  
Author(s):  
M López ◽  
N Tanaka ◽  
I Matsuyama ◽  
T Ishikawa
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Quantum Wires ◽  
Gaas Substrates
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