Nanometer-scale pattern formation of GaAs by in situ electron-beam lithography using surface oxide layer as a resist film

1995 ◽  
Vol 13 (6) ◽  
pp. 2777 ◽  
Author(s):  
Tomonori Ishikawa
Keyword(s):  
Electron Beam ◽  
Pattern Formation ◽  
Oxide Layer ◽  
Electron Beam Lithography ◽  
Surface Oxide ◽  
Nanometer Scale ◽  
Surface Oxide Layer

In situ FESEM fracture toughness experiment of copper nano-films with controlled surface oxide layer

2018 ◽  
Vol 2018 (0) ◽  
pp. GS0704 ◽  
Author(s):  
Toshiyuki KONDO ◽  
Daiki MIKI ◽  
Hiroyuki HIRAKATA ◽  
Kohji MINOSHIMA
Keyword(s):  
Fracture Toughness ◽  
Oxide Layer ◽  
Surface Oxide ◽  
Surface Oxide Layer

Patterning of GaAs by in situ electron beam lithography toward nanometer-scale structures

1992 ◽  
Vol 3 (2) ◽  
pp. 54-59 ◽  
Author(s):  
H Kawanishi ◽  
Y Sugimoto ◽  
K Akita ◽  
N Tanaka ◽  
T Ishikawa
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Nanometer Scale ◽  
Scale Structures

Effects of GaAs-Surface Roughness on the Electron-Beam Patterning Characteristics of a Surface-Oxide Layer

1996 ◽  
Vol 35 (Part 2, No. 5B) ◽  
pp. L619-L622 ◽  
Author(s):  
Tomonori Ishikawa ◽  
Nobuyuki Tanaka ◽  
Máximo López ◽  
Isamu Matsuyama
Keyword(s):  
Surface Roughness ◽  
Electron Beam ◽  
Oxide Layer ◽  
Surface Oxide ◽  
Gaas Surface ◽  
Surface Oxide Layer ◽  
Electron Beam Patterning

Effect of surface oxide layer on deuterium permeation behaviors through a type 316 stainless steel

2012 ◽  
Vol 87 (5-6) ◽  
pp. 580-583 ◽  
Author(s):  
Yasuhisa Oya ◽  
Makoto Kobayashi ◽  
Junya Osuo ◽  
Masato Suzuki ◽  
Akiko Hamada ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Oxide Layer ◽  
Surface Oxide ◽  
Surface Oxide Layer ◽  
316 Stainless Steel ◽  
Effect Of Surface
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