Practical manufacturing technique for reducing charge-induced gate oxide degradation during ion implantation

1999 ◽  
Author(s):  
Kenneth G. Moerschel ◽  
W. A. Possanza ◽  
James Sung ◽  
M. A. Prozonic ◽  
T. Long ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Gate Oxide ◽  
Manufacturing Technique ◽  
Oxide Degradation

scholarly journals Charge trapping and retention behaviors of Ge nanocrystals distributed in the gate oxide near the gate synthesized by low-energy ion implantation

2007 ◽  
Vol 101 (12) ◽  
pp. 124313 ◽  
Author(s):  
M. Yang ◽  
T. P. Chen ◽  
J. I. Wong ◽  
C. Y. Ng ◽  
Y. Liu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Charge Trapping ◽  
Gate Oxide ◽  
Low Energy ◽  
Ge Nanocrystals

Gate oxide degradation of SiC MOSFET under short-circuit aging tests

2016 ◽  
Vol 64 ◽  
pp. 415-418 ◽  
Author(s):  
S. Mbarek ◽  
F. Fouquet ◽  
P. Dherbecourt ◽  
M. Masmoudi ◽  
O. Latry
Keyword(s):  
Short Circuit ◽  
Gate Oxide ◽  
Oxide Degradation ◽  
Circuit Aging

Online Gate-Oxide Degradation Monitoring of Planar SiC MOSFETs Based on Gate Charge Time

2022 ◽  
pp. 1-1
Author(s):  
Minghang Xie ◽  
Pengju Sun ◽  
Kaihong Wang ◽  
Quanming Luo ◽  
Xiong Du
Keyword(s):  
Gate Oxide ◽  
Oxide Degradation ◽  
Degradation Monitoring ◽  
Gate Charge

Evaluation of the gate oxide transformed by ion implantation

1997 ◽  
Vol 121 (1-4) ◽  
pp. 311-314 ◽  
Author(s):  
Kazunobu Mameno ◽  
Hideharu Nagasawa ◽  
Atsuhiro Nishida ◽  
Hideaki Fujiwara
Keyword(s):  
Ion Implantation ◽  
Gate Oxide

Temperature accelerated gate oxide degradation under plasma-induced charging

1996 ◽  
Vol 17 (6) ◽  
pp. 288-290 ◽  
Author(s):  
T. Brozek ◽  
Y.D. Chan ◽  
C.R. Viswanathan
Keyword(s):  
Gate Oxide ◽  
Oxide Degradation

Ultrathin gate oxide degradation under different rates of charge injection

1999 ◽  
Author(s):  
Pitsini Mongkolkachit ◽  
Bharat L. Bhuva ◽  
Sharad Prasad ◽  
N. Bui ◽  
Sherra E. Kerns
Keyword(s):  
Charge Injection ◽  
Gate Oxide ◽  
Oxide Degradation

Effect of Electron Shading on Gate Oxide Degradation

1998 ◽  
Vol 37 (Part 1, No. 4B) ◽  
pp. 2321-2324 ◽  
Author(s):  
Shigenori Sakamori ◽  
Takahiro Maruyama ◽  
Nobuo Fujiwara ◽  
Hiroshi Miyatake
Keyword(s):  
Gate Oxide ◽  
Oxide Degradation
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