Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

1998 ◽  
Vol 69 (6) ◽  
pp. 2361-2364 ◽  
Author(s):  
M. Berglund ◽  
L. Rymell ◽  
H. M. Hertz ◽  
T. Wilhein
Keyword(s):  
Laser Plasma ◽  
Cryogenic Liquid ◽  
Liquid Jet ◽  
X Ray

X-ray and EUV laser-plasma sources based on cryogenic liquid-jet target

1999 ◽  
Author(s):  
Lars Rymell ◽  
Magnus Berglund ◽  
Bjoern A. M. Hansson ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Cryogenic Liquid ◽  
Liquid Jet ◽  
Plasma Sources ◽  
X Ray

Improved liquid jet laser-plasma source for X-ray microscopy

2003 ◽  
Vol 104 ◽  
pp. 121-122
Author(s):  
J. de Groot ◽  
G. A. Johansson ◽  
O. Hemberg ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
X Ray

Liquid-jet laser-plasma X-ray sources for microscopy and lithography

2001 ◽  
Vol 11 (PR2) ◽  
pp. Pr2-389-Pr2-396 ◽  
Author(s):  
H. M. Hertz ◽  
M. Berglund ◽  
B. A.M. Hansson ◽  
O. Hemberg ◽  
G. J. Johansson
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
X Ray

A Soft X-Ray Source Based on Cryogenic Liquid-Jet Target

2005 ◽  
Author(s):  
M. Berglund ◽  
L. Rymell ◽  
H.M. Hertz ◽  
T. Wilhein
Keyword(s):  
Cryogenic Liquid ◽  
Liquid Jet ◽  
X Ray

Liquid-jet target laser-plasma sources for EUV and X-ray lithography

1999 ◽  
Vol 46 (1-4) ◽  
pp. 453-455 ◽  
Author(s):  
L. Rymell ◽  
L. Malmqvist ◽  
M. Berglund ◽  
H.M. Hertz
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
Plasma Sources ◽  
X Ray

scholarly journals Liquid‐jet target for laser‐plasma soft x‐ray generation

1996 ◽  
Vol 67 (12) ◽  
pp. 4150-4153 ◽  
Author(s):  
L. Malmqvist ◽  
L. Rymell ◽  
M. Berglund ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
X Ray

Capillary nozzles for liquid-jet laser-plasma x-ray sources

2003 ◽  
Vol 74 (8) ◽  
pp. 3881-3882 ◽  
Author(s):  
J. de Groot ◽  
G. A. Johansson ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Liquid Jet ◽  
X Ray

Ablation Process of Silica Glass Induced by Laser Plasma Soft X-ray Irradiation

2009 ◽  
Vol 129 (4) ◽  
pp. 595-600
Author(s):  
Tetsuya Makimura ◽  
Takashige Fujimori ◽  
Shuichi Torii ◽  
Hiroyuki Niino ◽  
Kouichi Murakami
Keyword(s):  
Laser Plasma ◽  
Silica Glass ◽  
Ablation Process ◽  
X Ray
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