Comparison of measured sidewall roughness for positive-tone chemically amplified resists exposed by x-ray lithography

1999 ◽  
Author(s):  
Geoffrey W. Reynolds ◽  
James W. Taylor
Keyword(s):  
Sidewall Roughness ◽  
X Ray ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Radiation-Induced Acid Generation Reactions in Chemically Amplified Resists for Electron Beam and X-Ray Lithography

1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4301-4306 ◽  
Author(s):  
Takahiro Kozawa ◽  
Yoichi Yoshida ◽  
Mitsuru Uesaka ◽  
Seiichi Tagawa
Keyword(s):  
Electron Beam ◽  
X Ray ◽  
Acid Generation ◽  
Chemically Amplified ◽  
Radiation Induced ◽  
Chemically Amplified Resists

Study of Radiation-Induced Reactions in Chemically Amplified Resists for Electron Beam and X-Ray Lithography

1992 ◽  
Vol 31 (Part 2, No. 11A) ◽  
pp. L1574-L1576 ◽  
Author(s):  
Takahiro Kozawa ◽  
Yoichi Yoshida ◽  
Mitsuru Uesaka ◽  
Seiichi Tagawa
Keyword(s):  
Electron Beam ◽  
X Ray ◽  
Chemically Amplified ◽  
Radiation Induced ◽  
Chemically Amplified Resists

Chemically amplified resists for x-ray and e-beam lithography

1991 ◽  
Author(s):  
Amanda K. Berry ◽  
Karen A. Graziano ◽  
Stephen D. Thompson ◽  
James W. Taylor ◽  
Doowon Suh ◽  
...  
Keyword(s):  
X Ray ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Effects of Impurities on Processes of Acid Generation in Chemically Amplified Resists for Electron Beam and X-Ray Lithography

1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6049-6051 ◽  
Author(s):  
Takahiro Kozawa ◽  
Mitsuru Uesaka ◽  
Yoichi Yoshida ◽  
Seiichi Tagawa
Keyword(s):  
Electron Beam ◽  
X Ray ◽  
Acid Generation ◽  
Chemically Amplified ◽  
Chemically Amplified Resists
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