Piezoresistive pressure sensors for medical applications

1999 ◽  
Author(s):  
Inna Maryamova ◽  
Elena Lavitska ◽  
Igor Kogut ◽  
Alexey Kutrakov
Keyword(s):  
Pressure Sensors ◽  
Medical Applications ◽  
Piezoresistive Pressure Sensors

Partly Disposable Switching and Injection Microvalves for Medical Applications

1999 ◽  
Author(s):  
Hironobu Sato ◽  
Shuichi Shoji ◽  
Eipin Kim ◽  
Keisuke Miura
Keyword(s):  
Pressure Sensors ◽  
High Viscosity ◽  
Medical Applications ◽  
Flow Ratio ◽  
Silicone Membrane ◽  
Switching Valve ◽  
Low Viscosity ◽  
Sensing Systems ◽  
Different Types ◽  
Piezoresistive Pressure Sensors

Abstract Two types of one-inlet and four-outlets pneumatic microvalves for medical applications were fabricated and evaluated. Since the microvalves consist of a separable actuator part and a channel part, the channel part in which the sample liquid are introduced can be partly disposed. Both parts were fabricated using Si and polymer membrane. Two types of polymer membranes of silicone rubber and new cyclized perfluoro polymer (CPFP) were utilized in different types of microvalves for controlling high viscosity and low viscosity samples. In the case of the switching valve using silicone membrane, leakage was less than 0.01 μl/min (inlet pressure of 1mH2O) and the maximum open/closed flow ratio is larger than 105. These microvalves are useful in parallel and multi sensing systems. To achieve the monitoring the pneumatic actuation, integration of piezoresistive pressure sensors on the actuator part was also carried out.

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

Optimized technology for the fabrication of piezoresistive pressure sensors

2000 ◽  
Vol 10 (2) ◽  
pp. 204-208 ◽  
Author(s):  
A Merlos ◽  
J Santander ◽  
M D Alvarez ◽  
F Campabadal
Keyword(s):  
Pressure Sensors ◽  
Piezoresistive Pressure Sensors

scholarly journals Wearable Pressure Sensors Based on Carbonized Graphene Coated Waste Paper Aerogel

2021 ◽  
Author(s):  
Ang Li ◽  
Ce Cui ◽  
Weijie Wang ◽  
Yue Zhang ◽  
Jianyu Zhai ◽  
...  
Keyword(s):  
3D Structure ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Waste Paper ◽  
Low Density ◽  
Detection Range ◽  
Simple Strategy ◽  
Simple Filtration ◽  
Piezoresistive Pressure Sensors ◽  
Main Component

Abstract Graphene is complexed with cellulose fibers to construct 3D aerogels, which is generally considered to be an environmentally friendly and simple strategy to achieve wide sensing, high sensitivity and low detection of wearable piezoresistive pressure sensors. Here, graphene is incorporated into waste paper fibers with cellulose as the main component to prepare graphene coated waste paper aerogel (GWA) using a simple “filtration-oven drying” method under atmospheric pressure. The GWA was further annealed to obtain the carbonized graphene coated waste paper aerogel (C-GWA) to achieve low density and excellent resilience. The result shows that the C-GWA has a rough outer surface due to the 3D structure formed by interpenetrated fibers and the carbon skeleton with wrinkles. The sensor based on GCA shows low density (25mg/cm3), a wide detection range of 0-132 kPa, an ultra-low detection limit of 2.5 Pa (a green bean, ≈ 53.4 mg), and a high sensitivity of 31.6 kPa− 1. In addition, the sensor based on C-GWA with the excellent performance can be used to detect human motions including the pulse of the human body, cheek blowing and bending of human joints. The result indicates that the sensor based on C-GWA shows great potential for wearable electronic products.

High Sensitivity, Wearable, Piezoresistive Pressure Sensors Based on Irregular Microhump Structures and Its Applications in Body Motion Sensing

Small ◽  
2016 ◽  
Vol 12 (28) ◽  
pp. 3827-3836 ◽  
Author(s):  
Zongrong Wang ◽  
Shan Wang ◽  
Jifang Zeng ◽  
Xiaochen Ren ◽  
Adrian J. Y. Chee ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
High Sensitivity ◽  
Body Motion ◽  
Motion Sensing ◽  
Piezoresistive Pressure Sensors

Assembly and Testing of Surface Micromachined, Piezoresistive Polysilicon Pressure Sensors

1999 ◽  
Author(s):  
Todd F. Miller ◽  
David J. Monk ◽  
Gary O’Brien ◽  
William P. Eaton ◽  
James H. Smith
Keyword(s):  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
Surface Micromachining ◽  
Process Technology ◽  
Crystal Silicon ◽  
Noise Characteristics ◽  
Testing Techniques ◽  
Piezoresistive Pressure Sensors

Abstract Surface micromachining is becoming increasingly popular for microelectromechanical systems (MEMS) and a new application for this process technology is pressure sensors. Uncompensated surface micromachined piezoresistive pressure sensors were fabricated by Sandia National Labs (SNL). Motorola packaged and tested the sensors over pressure, temperature and in a typical circuit application for noise characteristics. A brief overview of surface micromachining related to pressure sensors is described in the report along with the packaging and testing techniques used. The electrical data found is presented in a comparative manner between the surface micromachined SNL piezoresistive polysilicon pressure sensor and a bulk micromachined Motorola piezoresistive single crystal silicon pressure sensor.

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