Determination of residual stress and elastic constants of silicon open stencil masks for ion projection lithography

Author(s):  
Artur Degen ◽  
Feng Shi ◽  
Eva Sossna ◽  
R. Sunyk ◽  
Joachim Voigt ◽  
...  
1990 ◽  
Vol 34 ◽  
pp. 689-698 ◽  
Author(s):  
J. Jo ◽  
R. W. Hendricks ◽  
W. D. Brewer ◽  
Karen M. Brown

Residual stress values in a material are governed by the measurements of the atomic spacings in a specific crystallographic plane and the elastic constant for that plane. It has been reported that the value of the elastic constant depends on microstructure, preferred orientation, plastic deformation and morphology [1], Thus, the theoretical calculation of the elastic constant may deviate from the intrinsic value for a real alloy.


1996 ◽  
Vol 25 (2-4) ◽  
pp. 229-236 ◽  
Author(s):  
S. Matthies

The basic formulas (Reuss's approximation) for residual stress analysis are given in a revised form. All ODF-burdened information reduces to five “moment pole figures” simply to, calculate using modern direct algorithms. The corresponding harmonic expressions are also more compact than other formulas known from literature. For texture components described by Standard Gaussian Functions the corresponding expressions can be given in an analytically closed form. The use of the concept of the geometrical mean approximation for calculating elastic constants (avoiding Reuss's limitations) will be explained in connection with the determination of residual stresses.


2019 ◽  
Author(s):  
R.Y. Zhang ◽  
H.L. Qin ◽  
Z.N. Bi ◽  
J. Li ◽  
S. Paul ◽  
...  
Keyword(s):  

1974 ◽  
Vol 41 (3) ◽  
pp. 647-651 ◽  
Author(s):  
Myron Levitsky ◽  
Bernard W. Shaffer

A method has been formulated for the determination of thermal stresses in materials which harden in the presence of an exothermic chemical reaction. Hardening is described by the transformation of the material from an inviscid liquid-like state into an elastic solid, where intermediate states consist of a mixture of the two, in a ratio which is determined by the degree of chemical reaction. The method is illustrated in terms of an infinite slab cast between two rigid mold surfaces. It is found that the stress component normal to the slab surfaces vanishes in the residual state, so that removal of the slab from the mold leaves the remaining residual stress unchanged. On the other hand, the residual stress component parallel to the slab surfaces does not vanish. Its distribution is described as a function of the parameters of the hardening process.


2013 ◽  
Vol 768-769 ◽  
pp. 201-208 ◽  
Author(s):  
Marek Rjelka ◽  
Martin Barth ◽  
Sven Reinert ◽  
Bernd Koehler ◽  
Joachim Bamberg ◽  
...  

Aero-engine components exposed to high mechanical stresses are made of high-strength alloys and additionally, they are surface treated by shot peening. This process introduces compressive residual stress into the material making it less sensitive to stress corrosion cracking and fatigue and therefore benefits the components performance and lifetime. Moreover cold work is induced in an amount depending on the peening parameters. To approximate the remaining lifetime, a quantitative, non-destructive method for stress assessment is required. It was shown that surface treatment of such alloys can be characterized by broadband Rayleigh wave dispersion measurements. However, the relative contributions of residual stress and cold work, respectively, remained an open point. This paper presents the determination of third order elastic constants (TOEC) for IN718 and Ti6246, providing, together with a model for the inversion of dispersion data, a quantitative access to the acoustoelastic effect. Finally, some measurements of differently treated samples are given.


1995 ◽  
Vol 52 (12) ◽  
pp. R8707-R8710 ◽  
Author(s):  
D. Fioretto ◽  
G. Carlotti ◽  
G. Socino ◽  
S. Modesti ◽  
C. Cepek ◽  
...  

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